I-Ellipsometer yeSpectroscopic eBalaseleyo neNgcono | Inkqubo yokulinganisa ubuNcinci beFilimu eNcinci kunye neRefractive Index

$I-Ellipsometer yeSpectroscopic eBalaseleyo neNgcono | Inkqubo yokulinganisa ubuNcinci beFilimu eNcinci kunye neRefractive Index Umfanekiso obonisiweyo$

$I-Ellipsometer yeSpectroscopic eBalaseleyo neNgcono | Inkqubo yokulinganisa ubuNcinci beFilimu eNcinci kunye neRefractive Index$
$I-Ellipsometer yeSpectroscopic eBalaseleyo neNgcono | Inkqubo yokulinganisa ubuNcinci beFilimu eNcinci kunye neRefractive Index$
$I-Ellipsometer yeSpectroscopic eBalaseleyo neNgcono | Inkqubo yokulinganisa ubuNcinci beFilimu eNcinci kunye neRefractive Index$
$I-Ellipsometer yeSpectroscopic eBalaseleyo neNgcono | Inkqubo yokulinganisa ubuNcinci beFilimu eNcinci kunye neRefractive Index$

Le ellipsometer ye-spectroscopic yinkqubo ye-optical metrology echanekileyo kakhulu eyenzelwe ukuchaza iifilimu ezincinci kunye nezinto ezinkulu ngendlela engonakalisiyo. Ngokusekelwe kwimigaqo ye-ellipsometry ephucukileyo, ilinganisa utshintsho lwe-polarization state (umlinganiselo we-amplitude Ψ kunye nomahluko wesigaba Δ) ukuze inike ii-optical constants ezichanekileyo kunye neeparameter zesakhiwo.

Ukuchaneka kokulinganisa okuphindaphindwayo:0.005nm

Uhlobo:I-MSK

Ixesha Lokulinganisa Elinye:≤15s

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

Imiyalelo yoku-odola

Ngenxa yohlobo olukhethekileyo lwemveliso, ixabiso eliboniswe kwiphepha lixabiso ledipozithi, hayi ixabiso lokwenyani. Nceda unxibelelane nenkonzo yabathengi ukuze ufumane ikowuteshini.

Ii-odolo ezenziwe ngqo ngaphandle kokunxibelelana kwangaphambili azinakuthunyelwa! Enkosi ngentsebenziswano yakho! Ukuze ufumane ulwazi oluthe kratya ngemveliso, nceda unxibelelane nenkonzo yabathengi ukuze ufumane iincwadana zemveliso.

@mskcnctool #i-ellipsometer #ifilimu encinci #ukwenziwa kwe-semiconductor #i-metrology #ukwaleka kwamehlo #izixhobo zelebheli #iseli yelanga #ubuchwepheshe bokwenza izinto #ukulinganisa ngokuchanekileyo ♬ isandi sokuqala - Izixhobo ze-MSK CNC

Iimilinganiselo eziphambili

Ubukhulu beFilimu (isuka kwi-single ukuya kwi-multi-layer)

Isalathisi sokuBuyisela (n) kunye neCoefficient yoKuphela (k)

Isithuba sebhendi yokukhanya (Umz)

Uburhabaxa bomphezulu

Iimbalasane zobugcisa

Uluhlu lwe-Wide Spectral: Ukugubungela i-UV ukuya kwi-NIR ukuze kuhlalutywe izinto ezahlukeneyo

Uvakalelo Oluphezulu: Iyakwazi ukulinganisa iifilimu ezincinci kakhulu ukuya kwisikali esingaphantsi kwe-nanometer

Ayichukumisi kwaye ayitshabalalisi: Ilungele iisampulu ezinobuthathaka kwiindawo zophando nophuhliso kunye nemveliso

Isoftware yokuModeli ePhambili: Ixhasa uhlalutyo oluntsonkothileyo lwezitaki ezinamaleya amaninzi kunye nemisebenzi yokusebenza elula ukuyisebenzisa

Izicelo

Le nkqubo yamkelwe kakhulu kwimveliso ye-semiconductor, i-optical coating, i-flat panel displays, uphuhliso lwe-photovoltaic (iiseli zelanga), uphando lwesayensi yezinto, kunye ne-biosensing.

Kutheni Ukhetha Isisombululo Sethu

Njengomvelisi ochwephesha onezakhono zophando nophuhliso oluqinileyo, sinikezela ngamaxabiso ngqo avela kumzi-mveliso, uhlengahlengiso olunokwenziwa ngokwezifiso, kunye nenkxaso yobugcisa ezinikeleyo. Nokuba ufuna inkqubo yebhentshi yohlalutyo lwelebhu okanye isisombululo esisemgceni sokujonga imveliso, singasilungiselela isixhobo ngokweemfuno zakho zokulinganisa.

Cela iNtetho

Qhagamshelana nathi namhlanje ukuze uxoxe ngesicelo sakho okanye ucele ikowuteshini. Iqela lethu libonelela ngeengcebiso zobugcisa zasimahla ukukunceda ukhethe isisombululo esifanelekileyo sokulinganisa ifilimu encinci.

IiParamitha zoBugcisa eziPhambili

1. Amandla okulinganisa: Izinto ze-Mueller matrix ze-16th order, i-polarization spectrum Psi/Delta, i-refractive index, ubukhulu, i-birefringence, kunye ne-dielectric constant, njl.njl.

2. Uluhlu lweSpectral: 210nm-1690nm

3. Isithuba sobude beWavelength: ≤0.8nm@210-1000nm, ≤3.5nm@1000-1690nm

4. Ixesha lokulinganisa i-Single Point: ≤10s

5. Ubungakanani be-Micro-spot: ≤200μm

6. Itekhnoloji yokuguqula: I-PCSCA dual rotary compensator system modulation

7. Isigaba seSampuli esiZenzekelayo: Ukugxila ngokuzenzekelayo kwe-Z-axis, ukuhamba okuphezulu kwe-18mm, inyathelo elincinci le-1µm

8. Ukuchaneka kokuphindaphinda ubukhulu befilimu: ≤0.005nm (100nm SiO2/Si, imilinganiselo ephindaphindwayo engama-30, ebalwa njenge-1σ)

9. Ukuchaneka kokuphindaphinda kwesalathisi sokubonisa ukuchaneka: ≤0.0002 (100nm SiO2/Si, imilinganiselo ephindaphindwayo engama-30, ebalwa njenge-1σ)

10. Ukuchaneka ngokupheleleyo kobukhulu befilimu: ≤0.5% (100nm SiO2/Si, ingxelo yemetrology yomntu wesithathu inikezelwe)

11. Umsebenzi wokumapha: Isebenzisa inqanaba lokuskena elizenzekelayo elichanekileyo kakhulu lohlobo lwe-x/y, ixhasa ukubeka ngokuzenzekelayo kunye nokulinganisa ukuskena kwe-substrates ze-2/4/6/8-intshi, ukuchaneka kokuphindaphinda ≤6μm, ukuveliswa kokucofa kube kanye kweemaphu zokusasazwa kobukhulu befilimu ye-2D/3D

12. Ukwahlulahlula nokugxila ngeLaser: Ukubeka ubude befocal ngokuzenzekelayo ngendlela ye-laser reflection optical, ukugxila kohambo ≤3mm

13. Imodeli yomahluko: Ibala ngokuzenzekelayo idatha yomahluko we-psi-diff kunye ne-delta-diff

14. Isoftware yohlalutyo: Ibonisa ubuncinane iindlela ezi-5 ezahlukeneyo zokulinganisa, isiseko sedatha se-n/k esakhelwe ngaphakathi sezixhobo zokukhanya ezingaphezulu kwe-100, kwaye ixhasa ukudala iidathabheyisi ezenziwe ngokwezifiso; inamandla okuvavanya kunye nokuhlela imodeli yeefilimu ezinomgangatho omnye, ezinemigangatho emininzi (ukuya kuthi ga kwi-30), kunye neefilimu ezincinci ezidibanisayo, kuquka iimodeli ze-cauchy, i-Sellmeier, i-Tauc-Lorentz, i-Bspline, kunye ne-Oscillator, kwaye ixhasa ilayisensi yesoftware engaxhunyiwe kwi-intanethi.

Iinkcukacha zobugcisa

I. Intshayelelo yezixhobo

I-ME-Mapping Spectroellipsometry inetekhnoloji yokuguqula i-compensator ejikelezayo kabini kunye ne-algorithms yohlalutyo lwedatha oluchanekileyo kakhulu. Inokufumana zonke izinto ezili-16 ze-Mueller matrix epheleleyo kunye ne-polarization spectrum ngomlinganiselo omnye, ovumela ukulinganiswa kwesampulu okukhawulezayo nokungonakalisiyo. Esi sixhobo sinoyilo oluzinzileyo lwendlela ye-optical kwaye sisebenzisa isixhobo sokubona esipholileyo se-semiconductor, sifumana imiqondiso yokukhanya ngaphakathi kwemizuzwana. Sibonelela ngesantya sokulinganisa esikhawulezayo kunye nokuchaneka okuphezulu, sixhasa ukulinganiswa okuchanekileyo kweeparameter ezifana nobukhulu, i-refractive index, i-extinction coefficient, kunye ne-optical dielectric constant yezixhobo ezahlukeneyo zefilimu encinci. Ngaphezu koko, inokwenziwa ngokwezifiso nge "wafer repeatable positioning stages" ezahlukeneyo ngobukhulu ukuze kulinganiswe imephu ye-multi-point yesampuli ezahlukeneyo ezinkulu.

II. Ububanzi beSicelo

Ii-Ellipometrists zisetyenziswa kakhulu kwi-semiconductors, kwi-flat panel displays, kwi-solar photovoltaics, kwi-optical thin films, kwi-optical communications, nakwi-nanomaterials.

III. Iimfuno zobuGcisa zizonke

1. Iinkcukacha zobuGcisa:
1.1 IiParameters zoMlinganiselo: Izinto ze-Mueller matrix ze-16th-order, i-Psi/Delta, i-refractive index, ubukhulu, i-birefringence, kunye ne-dielectric constant, njl.njl.
1.2 Uluhlu lweSpectral: 210nm-1690nm;
1.3 Ixesha lokulinganisa inqaku elinye: ≤10s;
1.4 Ubungakanani beMicrospot: ≤200μm;
1.5 Iteknoloji yokuguqula: Ukuguqulwa kwe-PC1SCA yokujikeleza kabini;
1.6 Isigaba seSampulu esiZenzekelayo: Ixhasa ukugxila kwe-z-axis ngokuzenzekelayo, ukuhamba okuphezulu yi-18mm, inyathelo elincinci yi-1μm;
1.7 Ukuphinda Ubungqingqwa beFilimu Ukuchaneka kokuphinda: ≤0.005nm (100nm SiO2/Si, imilinganiselo ephindaphindwayo engama-30, ibalwe yi-1σ);
1.8 Ukuchaneka kokuphinda kweRefractive Index: ≤0.0002 (100nm SiO2/Si, imilinganiselo ephindaphindwayo engama-30, ibalwe yi-1σ);
1.9 Ukuchaneka koBungqingqwa beFilimu obupheleleyo: ≤0.5% (100nm SiO2/Si, ingxelo yemetrology yomntu wesithathu inikezelwe); μm
1.10 Umsebenzi wokuMapha: Isebenzisa inqanaba lokuskena elizenzekelayo elichanekileyo kakhulu lohlobo lwe-x/y, elixhasa ukubekwa ngokuzenzekelayo kunye nokulinganiswa kokuskena kwe-substrates ze-2/4/6/8-intshi, kunye nokuchaneka okuphindaphindwayo ≤6μm, kunye nokuveliswa kokucofa kube kanye kweemaphu zokusasazwa kobukhulu befilimu ye-2D/3D;
1.11 Ukufumana nokugxila kwiLaser Rangefinding: Ukubeka ubude befocal ngokuzenzekelayo kusetyenziswa indlela ye-laser reflection optical, kunye nokuhamba kwe-focus-finding ≤3mm;
1.12 Uluhlu lokulinganisa ubungqingqwa befilimu: 1nm-10μm;
1.13 Imodeli yoMmahluko: Ibala ngokuzenzekelayo idatha yomahluko we-psi-diff kunye ne-delta-diff;
1.14 Isoftware yoHlahlelo:
* Amandla okulinganisa iSpectroscopic: Izinto ezili-16 zeMueller matrix epheleleyo, iPsi/Delta polarization spectroscopy, iN/C/S, i-depolarization, njl.njl.;
* Uhlalutyo lweDatha Amandla: Uyakwazi ukuhlalutya ubukhulu kunye nee-optical constants (n, k) zezixhobo zefilimu ezibhityileyo ze-isotropic kunye ne-anisotropic ezineleya enye kunye neleya ezininzi (ukuya kuthi ga kwi-20 layers);
* Ixhasa iimodeli ze-optical constants, i-refractive index gradient distribution, i-equal media, i-roughness, njl.njl., zeefilimu ezincinci ezineenxalenye ezininzi kunye nezinto ezinkulu;
* Ixhasa iimodeli eziqhelekileyo ze-optical constant kunye neemodeli ze-oscillator eziqhelekileyo (imodeli yeCauchy, imodeli yeLorentz, imodeli yeGaussian, iDrude, iSellmeier, njl.njl.), kwaye ixhasa ukufakwa kwemodeli ye-graphical multi-oscillator hybrid;
* Ixhasa ukukhupha imifanekiso ye-2D/3D, ukujonga idatha yembali, kunye nokuthumela ngaphandle nokuhlela idatha kunye neengxelo ezihambelanayo;
* Iifomathi zeMpahla yeDatha: TXT, CSV, SNAP snapshot, i-raw spectrum, i-DAT, njl.njl.;
* Ixhasa ukulinganiswa kokulibaziseka kwesigaba, ekwaziyo ukuvavanya ukulibaziseka kwesigaba, i-angle ye-azimuth, i-angle yokujikeleza kwe-optical, umlinganiselo we-amplitude, ulungelelwaniso, njl.njl.;
* Inomsebenzi wohlalutyo lwesakhiwo se-1D/2D rhoqo kunye nemisebenzi yokubonisa.

2. Uluhlu loqwalaselo:

1) Iseti enye yeyunithi ephambili ye-ellipsometer;

2) Iseti enye nganye yengalo ye-ellipsometry kunye nengalo ye-analyzer;

3) Iseti enye yesigaba sesampulu ezenzekelayo;

4) Iseti enye yesoftware yohlalutyo;

5) Iseti enye yeeslayidi ezisemgangathweni;

6) Ikhompyutha enye;

7) Iseti enye yezixhobo zokulungisa iimpazamo;

8) Iseti enye yendibano ye-micro-spot;

9) Impompo enye yokufunxa i-vacuum;

10) Inqanaba elinye lokuskena imephu.

3. Ikhompyutha yokulinganisa nokulawula

Isebenzisa ikhompyutha yemizi-mveliso yorhwebo enenkqubo yokusebenza yeWindows 10; iCPU: iprosesa ye-i7; iMemori: 15GB; iHard Disk: 1TB; iLCD monitor: 24-intshi; ibandakanya imawusi kunye nekhibhodi.

4. Iimfuno zeNdalo kunye neMandla:

1) Iimfuno zePlatform: 2.0m (ubude) x 1.2m (ububanzi), umthamo womthwalo ongaphezulu kwe-100kg (kucetyiswa ukuba kubekwe i-optical vibration isolation).
2) Uluhlu lobushushu bokusebenza: 20~30°C
3) Umswakama ohambelanayo: 35% ~ 60% RH
4) I-Voltage yoNikezo lwaMandla: 220VAC
5) Isigaba sangoku: Ixabiso le-RMS elingaphantsi kwe-4A (220VAC);
6) Amandla aphezulu: 800W

Into yokulinganisa i-Ellipsometry

Umgaqo wokulinganisa i-Ellipsometry

Ukulinganiswa kweFilimu echanekileyo kakhulu

Inkqubo yoHlalutyo lwe-Ellipsometry

I-Muller Matrix Ellipsometry

I-Ellipsometer yeSpectroscopic yeFilimu Encinci

I-Me-L Mueller Matrix Ellipsometry

I-ellipsometry ye-Mueller matrix echanekileyo ngokupheleleyo ezenzekelayo ngokuzenzekelayo

Uhlengahlengiso lwe-engile oluzenzekelayo ngokupheleleyo kunye netekhnoloji yokugxila, ukulinganisa ngokukhawuleza kokucofa kube kanye

Ujongano olusebenzisanayo lomntu nomatshini olukhokelwayo, amava okusebenza kwesoftware alula

Idathabheyisi yezinto ezityebileyo kunye nelayibrari yemodeli ye-algorithm, amandla okuhlaziya idatha anamandla

Iinkcukacha zobugcisa

Inombolo yoMzekelo	ME-L
Izicelo	Ibanga loPhando/leShishini
Imisebenzi esisiseko	I-Psi/Delta, i-R/T, i-Mueller Matrix, kunye nezinye izinzwa ze-optical
Uhlalutyo lweSpectrum	I-380-1000nm (ixhasa ukwandiswa ukuya kwi-193-2500nm)
Ixesha Lokulinganisa Elinye	≤15s
Ukuchaneka kokulinganisa ukuphindaphinda	0.005nm
Ukuchaneka Okupheleleyo (Umoya Wokulinganisa Ngokusebenzisa Umoya)	Iiparameter ze-Ellipsometry: 4 = 45 ± 0.05°, A = 0 ± 0.1° I-Muller matrix: I-Diagonal element m = 10.005 Isiqalelo esingaphandle kwe-diagonal m = 0 ± 0.005
Ukuchaneka kokuphindaphinda kweRefractive Index	0.0005
Ubungakanani bebala	Ubungakanani bendawo enkulu: 2-4 mm Ubungakanani bendawo encinci: 200 μm/100 μm Ubungakanani bebala elincinci kakhulu: 50 μm (kuxhomekeke kubude bomda)

Isalathisi sokuchaneka kokuphindaphinda sisekelwe kwiimilinganiselo ezingama-30 eziphindaphindwayo zesampuli esemgangathweni ye-100nm SiO2/Si;

Iiparameter ezithile zobugcisa zesixhobo zinxulumene neemodyuli ezisebenzayo kunye nezixhobo, kwaye idatha ekwitheyibhile yeyokubhekisela kuphela.

Uqwalaselo oluKhethekileyo

Ukukhethwa kweBhendi	I-VN: 380-1650nm
I-V: 380-1000nm	I-UN: 210-1650nm
I-UV: 245-1000nm	I-DN: 193-1650nm
I-UV+: 210-1000nm	I-UN+: 210-2500nm
I-DUV: 193-1000nm	I-DN+: 193-2500nm

Ukukhetha i-Angle

Izinzile: 65°
Okuzenzakalelayo: 45-90°
Isandla: 45-90° (ukunyuka kwe-5°)

Ezinye iindlela

Iinketho zeMephu: 100*100mm/200*200mm

Inqanaba loLawulo loBushushu: 190-550°C/RT-1000°C

Ngathi

Yasekwa ngo-2015, i-MSK (Tianjin) International Trading CO., Ltd ikhule ngokuqhubekayo kwaye yadlula.Rheinland ISO 9001 uqinisekiso. Sineziko zokugaya ezikumgangatho ophezulu ze-SACCKE zaseJamani, iziko lokuhlola izixhobo ze-ZOLLER ezi-axis ezintandathu zaseJamani, umatshini weTaiwan PALMARY kunye nezinye izixhobo zokwenza iimveliso eziphambili zamazwe ngamazwe, sizibophelele ekuveliseniikumgangatho ophezulu, inobungcali kwaye isebenza kakuhleIsixhobo se-CNC.

Ingcali yethu kukuyila nokuvelisa zonke iintlobo zezixhobo zokusika i-carbide eqinileyo:Iifektri zokuphelisa, iidrili, ii-reamers, iimpompo kunye nezixhobo ezikhethekileyo.Ifilosofi yethu yeshishini kukubonelela abathengi bethu ngezisombululo ezipheleleyo eziphucula imisebenzi yoomatshini, zonyuse imveliso, kwaye zinciphise iindleko.Inkonzo + Umgangatho + UkusebenzaIqela lethu leeNgcebiso likwabonelelaulwazi lwemveliso, kunye noluhlu lwezisombululo ezibonakalayo nezedijithali ukunceda abathengi bethu ukuba bangene ngokukhuselekileyo kwikamva le-4.0 yoshishino. Ukuze ufumane ulwazi oluthe kratya malunga nayo nayiphi na indawo ethile yenkampani yethu, ncedajonga indawo yethu orsebenzisa icandelo lokunxibelelana nathiukuze sifikelele kwiqela lethu ngqo.

Iprofayile yeFektri

Kutheni Ukhetha Thina

FAQ

Q1: Singoobani thina?

I-A1: Yasekwa ngo-2015, i-MSK (Tianjin) Cutting Technology CO.Ltd ikhule ngokuqhubekayo kwaye yadlula kwi-Rheinland ISO 9001
ukuqinisekiswa. Ngeziko zokugaya ze-SACCKE zaseJamani ezine-axis ezintlanu eziphezulu, iziko lokuhlola izixhobo ze-ZOLLER zaseJamani ezine-axis ezintandathu, umatshini weTaiwan PALMARY kunye nezinye izixhobo zokwenza iimveliso eziphambili zamazwe ngamazwe, sizibophelele ekuveliseni izixhobo ze-CNC eziphezulu, zobungcali nezisebenzayo.

Q2: Ngaba urhweba ngenkampani okanye umenzi?

A2: Singumzi-mveliso wezixhobo ze-carbide.

Umbuzo 3: Ngaba ungathumela iimveliso kwi-Forwarder yethu eTshayina?

A3: Ewe, ukuba une-Forwarder eTshayina, singakuvuyela ukumthumelela iimveliso.

Q4: Ngawaphi amanqanaba okuhlawula amkelekileyo?

A4: Ngokwesiqhelo siyayamkela i-T/T.

Q5: Ngaba uyazamkela ii-odolo ze-OEM?

A5: Ewe, i-OEM kunye nokwenza ngokwezifiso ziyafumaneka, kwaye sikwabonelela ngenkonzo yokuprinta ilebheli.

Umbuzo 6: Kutheni ufanele ukhethe thina?

A6:1) Ulawulo lweendleko - ukuthenga iimveliso ezikumgangatho ophezulu ngexabiso elifanelekileyo.

2) Impendulo ekhawulezileyo - zingadlulanga iiyure ezingama-48, abasebenzi abaziingcali baya kukunika ikowuteshini baze bajongane neengxaki zakho.

3) Umgangatho ophezulu - Le nkampani isoloko iqinisekisa ngeenjongo ezinyanisekileyo ukuba iimveliso ebonelela ngazo zikumgangatho ophezulu ngokupheleleyo.

4) Inkonzo yokuthenga emva kokuthengisa kunye nesikhokelo sobugcisa - Le nkampani inika inkonzo yokuthenga emva kokuthengisa kunye nesikhokelo sobuchwepheshe ngokweemfuno neemfuno zabathengi.

Ngaphambili: Isixhobo Sokulinganisa I-Contour Echanekileyo Kakhulu SP1000 | Isivavanyeli seProfayili ye-2D kunye ne-Surface Toughness

Okulandelayo: I-Laser Tracker Enkulu Ephathekayo | Inkqubo Yokulinganisa I-3D Echanekileyo Kakhulu Yezimboni