Lub Tshuab Ntsuas Spectroscopic Ellipsometer Uas Muaj Kev Ntsuas Siab | Lub Tshuab Ntsuas Thin Film Thin Thickness & Refractive Index uas Tsis Ua Rau Puas Tsuaj
Cov Lus Qhia Txog Kev Yuav Khoom
Vim yog qhov tshwj xeeb ntawm cov khoom, tus nqi uas qhia rau ntawm nplooj ntawv yog tus nqi tso nyiaj, tsis yog tus nqi tiag tiag. Thov hu rau cov neeg ua haujlwm pabcuam rau cov neeg siv khoom kom tau txais tus nqi.
Cov xaj uas tau muab tso ncaj qha yam tsis tau tiv tauj ua ntej yuav tsis tuaj yeem xa tuaj! Ua tsaug rau koj txoj kev koom tes! Yog xav paub ntxiv txog cov khoom, thov hu rau cov neeg ua haujlwm pabcuam cov neeg siv khoom kom tau txais cov ntawv qhia txog cov khoom.
Cov Kev Ntsuas Tseem Ceeb
Zaj duab xis tuab (ib txheej rau ntau txheej)
Refractive Index (n) & Extinction Coefficient (k)
Qhov Sib Txawv ntawm Optical Band (Eg)
Qhov Roughness ntawm qhov chaw
Cov Ntsiab Lus Tseem Ceeb
Ntau Yam Spectral Dav: UV mus rau NIR kev pab them nqi rau kev tshuaj xyuas cov khoom siv ntau yam
Kev rhiab heev: Muaj peev xwm ntsuas cov yeeb yaj kiab ultra-thin mus rau qhov ntsuas sub-nanometer
Tsis Sib Chwv & Tsis Ua Rau Puas Tsuaj: Zoo tagnrho rau cov qauv rhiab heev hauv R&D thiab cov chaw tsim khoom
Advanced Modeling Software: Txhawb kev tshuaj xyuas ntau txheej sib tshooj nrog cov txheej txheem ua haujlwm yooj yim rau cov neeg siv
Cov ntawv thov
Lub kaw lus no tau txais kev pom zoo dav dav hauv kev tsim khoom semiconductor, kev txheej txheem kho qhov muag, cov zaub tiaj tiaj, kev tsim photovoltaic (solar cell), kev tshawb fawb txog cov ntaub ntawv, thiab biosensing.
Vim Li Cas Thiaj Xaiv Peb Txoj Kev daws teeb meem
Ua ib lub chaw tsim khoom tshaj lij uas muaj peev xwm R&D zoo, peb muab cov nqi ncaj qha los ntawm lub Hoobkas, kev teeb tsa uas hloov kho tau, thiab kev txhawb nqa kev txawj ntse. Txawm tias koj xav tau lub tshuab ua haujlwm rau kev tshuaj xyuas hauv chaw kuaj mob lossis kev daws teeb meem hauv kab rau kev saib xyuas kev tsim khoom, peb tuaj yeem kho cov cuab yeej kom haum rau koj cov kev xav tau ntsuas tshwj xeeb.
Thov Ib Daim Ntawv Qhia Txog Tus Nqi
Tiv tauj peb hnub no los tham txog koj daim ntawv thov lossis thov kom peb muab tus nqi rau koj. Peb pab neeg muab kev sab laj pub dawb los pab koj xaiv qhov kev daws teeb meem zoo tshaj plaws rau kev ntsuas cov yeeb yaj kiab nyias.
Cov Kev Ntsuas Tseem Ceeb
1. Kev Ntsuas Peev Xwm: 16th order Mueller matrix elements, polarization spectrum Psi/Delta, refractive index, thickness, birefringence, thiab dielectric constant, thiab lwm yam.
2. Ntau yam spectral: 210nm-1690nm
3. Qhov Ntev Ntawm Qhov Ncua: ≤0.8nm@210-1000nm, ≤3.5nm@1000-1690nm
4. Lub Sijhawm Ntsuas Ib Leeg: ≤10s
5. Qhov Loj Me Me: ≤200μm
6. Kev Siv Tshuab Modulation: PCSCA dual rotary compensator system modulation
7. Theem Qauv Tsis Siv Neeg: Z-axis tsis siv neeg tsom, qhov siab tshaj plaws mus ncig 18 hli, kauj ruam tsawg kawg nkaus 1µm
8. Qhov tseeb ntawm zaj duab xis tuab: ≤0.005nm (100nm SiO2 / Si, 30 qhov kev ntsuas rov ua dua, xam ua 1σ)
9. Qhov tseeb ntawm qhov ntsuas rov ua dua ntawm qhov ntsuas refractive: ≤0.0002 (100nm SiO2/Si, 30 qhov kev ntsuas rov ua dua, xam ua 1σ)
10. Qhov tseeb ntawm zaj duab xis tuab: ≤0.5% (100nm SiO2 / Si, daim ntawv qhia txog kev ntsuas ntawm tus neeg thib peb tau muab)
11. Kev ua haujlwm ntawm daim ntawv qhia: Siv cov theem ntsuas x/y hom tsis siv neeg siab, txhawb kev ntsuas qhov chaw thiab kev ntsuas ntsuas ntawm 2/4/6/8-nti substrates, qhov tseeb rov ua dua ≤6μm, ib-nias tiam ntawm 2D/3D zaj duab xis tuab faib daim ntawv qhia
12. Kev ntsuas laser thiab kev tsom mus rau: Kev tso qhov ntev ntawm qhov chaw tsis siv neeg los ntawm kev xav txog laser, kev tsom mus rau ≤3mm
13. Qauv sib txawv: Xam cov ntaub ntawv sib txawv psi-diff thiab delta-diff tau yooj yim
14. Software tsom xam: Muaj tsawg kawg yog 5 hom kev ntsuas sib txawv, lub hauv paus ntaub ntawv n/k uas ua rau ntau tshaj 100 yam khoom siv kho qhov muag, thiab txhawb nqa kev tsim cov ntaub ntawv tshwj xeeb; muaj peev xwm kuaj thiab ua qauv tshuaj ntsuam rau ib txheej, ntau txheej (txog li 30 txheej), thiab cov yeeb yaj kiab nyias sib xyaw, suav nrog cauchy, Sellmeier, Tauc-Lorentz, Bspline, thiab Oscillator qauv, thiab txhawb nqa kev tso cai software offline.
Cov Lus Qhia Txog Kev Siv
I. Kev Taw Qhia Txog Khoom Siv
Lub ME-Mapping Spectroellipsometry muaj cov thev naus laus zis dual-rotation compensator modulation ua ke nrog cov algorithms tsom xam cov ntaub ntawv siab. Nws tuaj yeem tau txais tag nrho 16 yam ntawm tag nrho Mueller matrix thiab polarization spectrum hauv ib qho kev ntsuas, ua rau kev ntsuas cov qauv sai thiab tsis ua puas tsuaj. Lub cuab yeej muaj kev tsim qauv optical path ruaj khov thiab siv lub semiconductor-cooled detector, tau txais cov teeb liab lub teeb hauv ob peb feeb xwb. Nws muab kev ntsuas ceev dua thiab qhov tseeb dua, txhawb kev ntsuas qhov tseeb ntawm cov yam ntxwv xws li thickness, refractive index, extinction coefficient, thiab optical dielectric constant rau ntau yam khoom siv zaj duab xis nyias. Ntxiv mus, nws tuaj yeem hloov kho nrog ntau qhov loj me "wafer repeatable positioning stages" rau ntau qhov kev ntsuas scanning ntawm ntau yam qauv loj.
II. Scope ntawm Daim Ntawv Thov
Ellipsometrists feem ntau yog siv rau hauv semiconductors, cov zaub vaj huam sib luag tiaj tus, lub hnub ci photovoltaics, cov yeeb yaj kiab nyias nyias optical, kev sib txuas lus optical, thiab nanomaterials.
III. Cov Kev Cai Txog Kev Siv Tshuab Tag Nrho
1. Cov Lus Qhia Txog Kev Siv:
1.1 Cov Kev Ntsuas: 16th-order Mueller matrix elements, Psi/Delta, refractive index, thickness, birefringence, thiab dielectric constant, thiab lwm yam.
1.2 Spectral Ntau Yam: 210nm-1690nm;
1.3 Lub Sijhawm Ntsuas Ib Leeg: ≤10s;
1.4 Qhov Loj Me Me: ≤200μm;
1.5 Kev Siv Tshuab Modulation: PC1SCA dual rotation compensation modulation;
1.6 Theem Qauv Tsis Siv Neeg: Txhawb kev tsom mus rau z-axis tsis siv neeg, qhov siab tshaj plaws mus ncig 18 hli, kauj ruam tsawg kawg nkaus 1μm;
1.7 Zaj duab xis Thickness Repeatability Accuracy: ≤0.005nm (100nm SiO2/Si, 30 rov ntsuas, xam 1σ);
1.8 Refractive Index Repeatability Accuracy: ≤0.0002 (100nm SiO2/Si, 30 qhov kev ntsuas rov ua dua, xam 1σ);
1.9 Qhov Tseeb Txog Qhov Thickness Zaj Duab Xis: ≤0.5% (100nm SiO2/Si, daim ntawv qhia txog kev ntsuas ntawm tus neeg thib peb muab); μm
1.10 Kev Ua Haujlwm Qhia: Siv lub sijhawm ntsuas x/y-hom tsis siv neeg siab, txhawb nqa qhov chaw tsis siv neeg thiab ntsuas kev ntsuas ntawm 2/4/6/8-nti substrates, nrog qhov tseeb rov ua dua ≤6μm, thiab ib-nias tiam ntawm 2D/3D zaj duab xis tuab faib daim ntawv qhia;
1.11 Kev Ntsuas Qhov Ntev thiab Kev Tsom Xam Laser: Tso qhov ntev ntawm qhov tsom xam siv txoj kev pom kev laser, nrog rau kev mus ncig nrhiav qhov tsom xam ≤3mm;
1.12 Kev Ntsuas Qhov Ntev Ntawm Zaj Duab Xis: 1nm-10μm;
1.13 Tus Qauv Sib Txawv: Xam cov ntaub ntawv sib txawv psi-diff thiab delta-diff tau;
1.14 Cov Kev Tshawb Fawb Txog Software:
* Kev Ntsuas Spectroscopic: 16 yam ntawm tag nrho Mueller matrix, Psi/Delta polarization spectroscopy, N/C/S, depolarization, thiab lwm yam.;
* Kev Muaj Peev Xwm Tshawb Xyuas Cov Ntaub Ntawv: Muaj peev xwm tshawb xyuas qhov tuab thiab qhov tsis hloov pauv ntawm qhov muag (n, k) ntawm ib txheej thiab ntau txheej (txog li 20 txheej) cov ntaub ntawv nyias nyias isotropic thiab anisotropic;
* Txhawb cov qauv rau cov khoom siv kho qhov muag tsis hloov pauv, kev faib tawm ntawm cov ntsuas refractive index, cov xov xwm sib npaug, qhov ntxhib, thiab lwm yam, ntawm ntau cov yeeb yaj kiab nyias nyias thiab cov khoom siv loj;
* Txhawb cov qauv kho qhov muag tas li thiab cov qauv oscillator (qauv Cauchy, qauv Lorentz, qauv Gaussian, Drude, Sellmeier, thiab lwm yam), thiab txhawb cov qauv graphical multi-oscillator hybrid;
* Txhawb kev tso tawm cov duab 2D / 3D topographic, saib cov ntaub ntawv keeb kwm, thiab xa tawm thiab kho cov ntaub ntawv thiab cov ntawv qhia sib xws;
* Cov Hom Ntawv Tso Tawm Cov Ntaub Ntawv: TXT, CSV, SNAP snapshot, raw spectrum, DAT, thiab lwm yam.;
* Txhawb kev ntsuas theem qeeb, muaj peev xwm sim theem qeeb, azimuth lub kaum sab xis, optical rotation lub kaum sab xis, amplitude ratio, order, thiab lwm yam.;
* Muaj 1D/2D periodic grating qauv kev tshuaj xyuas thiab qauv ua haujlwm.
2. Daim Ntawv Teev Cov Kev Teeb Tsa:
1) Ib pawg ntawm ellipsometer lub ntsiab chav tsev;
2) Ib txheej ntawm txhua sab caj npab ellipsometry thiab sab caj npab analyzer;
3) Ib txheej ntawm cov qauv tsis siv neeg;
4) Ib pawg ntawm cov software tsom xam;
5) Ib txheej ntawm cov slides txheem;
6) Ib lub khoos phis tawj;
7) Ib pawg ntawm cov cuab yeej debugging;
8) Ib pawg ntawm cov khoom sib dhos me me;
9) Ib lub twj tso kua mis nqus tsev;
10) Ib theem scanning mapping.
3. Kev Ntsuas thiab Kev Tswj Xyuas Computer
Siv lub PC lag luam nrog Windows 10 operating system; CPU: i7 processor; Nco: 15GB; Hard Disk: 1TB; LCD monitor: 24-nti; suav nrog nas thiab keyboard.
4. Cov Kev Cai Ib puag ncig thiab Fais Fab:
1) Cov Kev Cai Rau Lub Platform: 2.0m (ntev) x 1.2m (dav), muaj peev xwm thauj khoom ntau dua 100kg (pom zoo kom siv kev rho tawm kev co optical).
2) Kev Ua Haujlwm Kub: 20 ~ 30 ° C
3) Qhov av noo sib piv: 35% ~ 60% RH
4) Lub Hwj Chim Fais Fab: 220VAC
5) Theem Tam Sim No: RMS tus nqi tsawg dua 4A (220VAC);
6) Lub zog siab tshaj plaws: 800W
Kev Ntsuas Ellipsometry
Txoj Cai Ntsuas Ellipsometry
Cov Txheej Txheem Tshawb Fawb Ellipsometry
Muller Matrix Ellipsometry
ME-L Mueller Matrix Ellipsometry
Kev tshawb fawb-qib siab tsis siv neeg siab precision Mueller matrix ellipsometry
Kev kho lub kaum sab xis thiab kev tsom mus rau lub tshuab, kev ntsuas sai ib zaug xwb
Kev sib tham sib txuas lus ntawm tib neeg thiab tshuab, kev paub txog kev ua haujlwm software yooj yim
Cov ntaub ntawv nplua nuj thiab cov qauv algorithm tsev qiv ntawv, muaj peev xwm tshuaj xyuas cov ntaub ntawv muaj zog
Cov Lus Qhia Txog Kev Siv
| Tus Qauv Tooj | ME-L |
| Cov ntawv thov | Qib Kev Tshawb Fawb / Kev Lag Luam |
| Cov Haujlwm Tseem Ceeb | Psi/Delta, R/T, Mueller Matrix, thiab lwm yam khoom siv kho qhov muag |
| Kev Tshuaj Xyuas Spectrum | 380-1000nm (txhawb kev nthuav dav mus rau 193-2500nm) |
| Lub Sijhawm Ntsuas Ib Zaug | ≤15s |
| Kev Ntsuas Rov Ua Dua Qhov Tseeb | 0.005nm |
| Qhov Tseeb Tseeb (Kev Ntsuas Huab Cua Los Ntawm Kev Ntsuas) | Cov kev ntsuas ellipsometry: 4 = 45 ± 0.05°, A = 0 ± 0.1° Muller matrix: Lub ntsiab lus diagonal m = 10.005 Lub ntsiab lus tawm ntawm kab pheeb ces kaum m = 0 ± 0.005 |
| Kev Ntsuas Refractivity Repeatability Qhov Tseeb | 0.0005 |
| Qhov Loj ntawm Qhov Chaw | Qhov loj ntawm qhov chaw loj: 2-4 hli Qhov me me ntawm qhov chaw: 200 μm / 100 μm Qhov me me ntawm qhov chaw: 50 μm (nyob ntawm qhov wavelength) |
Qhov ntsuas qhov tseeb ntawm qhov rov ua dua yog raws li 30 qhov kev ntsuas rov ua dua ntawm 100nm SiO2/Si tus qauv qauv;
Cov kev ntsuas tshwj xeeb ntawm cov cuab yeej muaj feem cuam tshuam nrog cov modules ua haujlwm tiag tiag thiab cov khoom siv, thiab cov ntaub ntawv hauv lub rooj tsuas yog rau kev siv xwb.
Kev Teeb tsa Xaiv Tau
| Kev Xaiv Band | VN: 380-1650nm |
| V: 380-1000nm | UN: 210-1650nm |
| UV: 245-1000nm | DN: 193-1650nm |
| UV+: 210-1000nm | UN+: 210-2500nm |
| DUV: 193-1000nm | DN+: 193-2500nm |
Kev Xaiv Lub Kaum
Kho: 65°
Tsis siv neeg: 45-90 °
Kev Tuav Tes: 45-90° (nce 5°)
Lwm Cov Kev Xaiv
Kev Xaiv Qhia: 100 * 100mm / 200 * 200mm
Kev Tswj Kub: 190-550 ° C / RT-1000 ° C
Txog Peb
Lub Hoobkas Profile
Vim Li Cas Xaiv Peb
Cov Lus Nug Feem Ntau
Q1: Peb yog leej twg?
A1: Tsim muaj xyoo 2015, MSK (Tianjin) Cutting Technology CO.Ltd tau loj hlob tas mus li thiab dhau Rheinland ISO 9001
Kev lees paub. Nrog rau German SACCKE high-end tsib-axis sib tsoo chaw, German ZOLLER rau-axis cuab yeej tshuaj xyuas chaw, Taiwan PALMARY tshuab thiab lwm yam khoom siv thoob ntiaj teb advanced, peb cog lus tias yuav tsim cov cuab yeej CNC high-end, kev tshaj lij thiab ua haujlwm tau zoo.
Q2: Koj puas yog lub tuam txhab lag luam lossis chaw tsim khoom?
A2: Peb yog lub Hoobkas ntawm cov cuab yeej carbide.
Q3: Koj puas tuaj yeem xa cov khoom mus rau peb tus Forwarder hauv Suav teb?
A3: Yog, yog tias koj muaj Forwarder hauv Suav teb, peb yuav zoo siab xa cov khoom mus rau nws.
Q4: Cov nqe lus them nqi twg thiaj siv tau?
A4: Feem ntau peb lees txais T / T.
Q5: Koj puas txais OEM cov lus txib?
A5: Yog, OEM thiab kev hloov kho kom haum, thiab peb kuj muab kev pabcuam luam ntawv.
Q6: Vim li cas koj thiaj yuav tsum xaiv peb?
A6:1) Kev tswj tus nqi - yuav cov khoom zoo ntawm tus nqi tsim nyog.
2) Teb sai - hauv 48 teev, cov neeg ua haujlwm tshaj lij yuav muab tus nqi rau koj thiab daws koj cov kev txhawj xeeb.
3) Zoo - Lub tuam txhab ib txwm ua pov thawj nrog lub siab dawb paug tias cov khoom uas nws muab yog 100% zoo.
4) Kev pab cuam tom qab muag khoom thiab kev taw qhia txog kev siv tshuab - Lub tuam txhab muab kev pab cuam tom qab muag khoom thiab kev taw qhia txog kev siv tshuab raws li cov neeg siv khoom xav tau thiab xav tau.
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