I-Ellipsometer Ephakeme Kakhulu Ye-Spectroscopic | Uhlelo Lokulinganisa I-Film Thin Engabhubhisi kanye Ne-Refractive Index
Imiyalelo Yoku-oda
Ngenxa yohlobo olukhethekile lomkhiqizo, intengo eboniswe ekhasini iyintengo yediphozithi, hhayi intengo yangempela. Sicela uxhumane nesevisi yamakhasimende ukuze uthole isilinganiso.
Ama-oda afakwe ngqo ngaphandle kokuxhumana kwangaphambilini awakwazi ukuthunyelwa! Siyabonga ngokubambisana kwenu! Ukuze uthole ulwazi olwengeziwe ngomkhiqizo, sicela uxhumane nesevisi yamakhasimende ukuze uthole izincwajana zomkhiqizo.
Izilinganiso Eziyinhloko
Ubukhulu befilimu (kusuka kokukodwa kuya kokunezingqimba eziningi)
Inkomba Yokubukeza (n) kanye ne-Extinction Coefficient (k)
Isikhala Sebhendi Yokukhanya (Isib)
Ubulukhuni Bomphezulu
Okuvelele Kobuchwepheshe
Ububanzi be-Wide Spectral: Ukumbozwa kwe-UV kuya ku-NIR ukuze kuhlaziywe izinto ezihlukahlukene
Ukuzwela Okuphezulu: Iyakwazi ukulinganisa amafilimu amancane kakhulu kuze kufike esikalini se-sub-nanometer
Akuthinteki futhi akubhubhisi: Kulungele amasampula abucayi ezindaweni zocwaningo nokuthuthukiswa kanye nokukhiqiza
Isofthiwe Yokumodela Ethuthukisiwe: Isekela ukuhlaziywa kwezitaki eziyinkimbinkimbi ezinezingqimba eziningi ngemisebenzi elula ukuyisebenzisa
Izicelo
Lolu hlelo lusetshenziswa kabanzi ekukhiqizweni kwe-semiconductor, ukumbozwa kwe-optical, ukubonisa amaphaneli ayisicaba, ukuthuthukiswa kwe-photovoltaic (amaseli elanga), ucwaningo lwesayensi yezinto zokwakha, kanye nokuzwa kwe-bio.
Kungani Kufanele Ukhethe Isixazululo Sethu
Njengomkhiqizi ochwepheshe onamakhono aqinile e-R&D, sinikeza amanani aqondile embonini, ukucushwa okwenziwe ngokwezifiso, kanye nokusekelwa kobuchwepheshe okuzinikele. Kungakhathaliseki ukuthi udinga uhlelo lwe-benchtop lokuhlaziywa kwelabhorethri noma isisombululo esiku-inthanethi sokuqapha umkhiqizo, singakwazi ukwenza ithuluzi livumelane nezidingo zakho zokulinganisa ezithile.
Cela Isilinganiso
Xhumana nathi namuhla ukuze uxoxe ngesicelo sakho noma ucele ikhotheshini. Ithimba lethu linikeza ukubonisana kobuchwepheshe kwamahhala ukukusiza ukhethe ikhambi elifanele kakhulu lokulinganisa ifilimu encane.
Amapharamitha Obuchwepheshe Ayinhloko
1. Amakhono Okulinganisa: Izinto ze-Mueller matrix ze-oda le-16, i-polarization spectrum Psi/Delta, i-refractive index, ukujiya, i-birefringence, kanye ne-dielectric constant, njll.
2. Ububanzi be-Spectral: 210nm-1690nm
3. Isikhala Sobude Begagasi: ≤0.8nm@210-1000nm, ≤3.5nm@1000-1690nm
4. Isikhathi Sokulinganisa Esinephuzu Elilodwa: ≤10s
5. Usayizi we-Micro-spot: ≤200μm
6. Ubuchwepheshe Bokushintshashintsha: Ukuguqulwa kwesistimu ye-PCSCA ejikelezayo kabili
7. Isigaba Sesampula Esizenzakalelayo: Ukugxila okuzenzakalelayo kwe-Z-axis, ukuhamba okuphezulu okungu-18mm, isinyathelo esincane esingu-1µm
8. Ukunemba kokuphindaphinda kobukhulu befilimu: ≤0.005nm (100nm SiO2/Si, izilinganiso eziphindaphindwayo ezingu-30, ezibalwa njengo-1σ)
9. Ukunemba kokuphindaphinda kwenkomba yokubuka kabusha: ≤0.0002 (100nm SiO2/Si, izilinganiso eziphindaphindwayo ezingu-30, ezibalwa njengo-1σ)
10. Ukunemba okuphelele kokujiya kwefilimu: ≤0.5% (100nm SiO2/Si, umbiko we-metrology weqembu lesithathu unikeziwe)
11. Umsebenzi wokwenza imephu: Isebenzisa isigaba sokuskena okuzenzakalelayo sohlobo lwe-x/y olunembile kakhulu, isekela ukubeka okuzenzakalelayo kanye nokulinganisa ukuskena kwezingxenye ezingaphansi kwe-2/4/6/8-intshi, ukunemba okuphindaphindwayo ≤6μm, isizukulwane sokuchofoza okukodwa samamephu okusabalalisa ubukhulu befilimu ye-2D/3D ngokuchofoza okukodwa
12. Ukuhlukanisa nokugxila nge-laser: Ukubeka ubude bokugxila ngokuzenzakalela ngendlela yokukhanya ye-laser, ukugxila kokuhamba ≤3mm
13. Imodeli yomehluko: Ibala ngokuzenzakalelayo idatha yomehluko we-psi-diff kanye ne-delta-diff
14. Isofthiwe yokuhlaziya: Ifaka okungenani izindlela zokulinganisa ezi-5 ezahlukene, isizindalwazi se-n/k esakhelwe ngaphakathi sezinto ezibonakalayo ezingaphezu kwe-100, futhi isekela ukudala izizindalwazi ezenziwe ngokwezifiso; inamakhono okuhlola nokuhlaziya amamodeli e-single-layer, multi-layer (kufika ezingqimbeni ezingu-30), kanye namafilimu amancane ashintshanayo ahlanganisiwe, kufaka phakathi amamodeli e-cauchy, Sellmeier, Tauc-Lorentz, Bspline, kanye ne-Oscillator, futhi isekela ilayisensi yesofthiwe engaxhunyiwe ku-inthanethi.
Imininingwane Yobuchwepheshe
I. Isingeniso Semishini
I-ME-Mapping Spectroellipsometry ifaka ubuchwepheshe bokuguqulwa kwe-dual-rotation compensator obuhlanganiswe nama-algorithms okuhlaziya idatha anembile kakhulu. Ingathola zonke izakhi ezingu-16 ze-Mueller matrix ephelele kanye ne-polarization spectrum ngesilinganiso esisodwa, okuvumela ukulinganiswa kwesampula okusheshayo nokungonakalisi. Ithuluzi liziqhenya ngomklamo wendlela yokukhanya ozinzile futhi lisebenzisa i-semiconductor-cooled detector, lithola izimpawu zokukhanya ngemizuzwana. Linikeza isivinini sokulinganisa esisheshayo kanye nokunemba okuphezulu, lisekela ukulinganiswa okunembile kwamapharamitha afana nobukhulu, inkomba yokubuyisa, i-extinction coefficient, kanye ne-optical dielectric constant yezinto ezahlukahlukene zefilimu encane. Ngaphezu kwalokho, ingenziwa ngokwezifiso ngezigaba ezahlukene "zokubeka indawo eziphindaphindwayo ze-wafer" zokulinganisa ukuskena kwamamephu amaningi kwamasampula ahlukahlukene amakhulu.
II. Ububanzi Bokusetshenziswa
Ama-Ellipometrist asetshenziswa kakhulu kuma-semiconductors, kuma-flat panel displays, kuma-solar photovoltaics, kuma-optical thin films, kuma-optical communications, kanye nama-nanomaterials.
III. Izidingo Zobuchwepheshe Eziphelele
1. Imininingwane Yobuchwepheshe:
1.1 Amapharamitha Okulinganisa: Izinto ze-Mueller matrix ze-oda le-16, i-Psi/Delta, i-refractive index, ukujiya, i-birefringence, kanye ne-dielectric constant, njll.
1.2 Ububanzi be-Spectral: 210nm-1690nm;
1.3 Isikhathi Sokulinganisa Sephuzu Elilodwa: ≤10s;
1.4 Usayizi we-Microspot: ≤200μm;
1.5 Ubuchwepheshe Bokushintshashintsha: Ukuguqulwa kwesinxephezelo sokujikeleza okubili kwe-PC1SCA;
1.6 Isigaba Sesampula Esizenzakalelayo: Sisekela ukugxila kwe-z-axis okuzenzakalelayo, ukuhamba okuphezulu okungu-18mm, isinyathelo esincane esingu-1μm;
1.7 Ukunemba Kokuphindwa Kokujiya Kwefilimu: ≤0.005nm (100nm SiO2/Si, izilinganiso eziphindaphindwayo ezingu-30, kubalwe u-1σ);
1.8 Ukunemba Kokuphindwa Kwenkomba Yokubukeza: ≤0.0002 (100nm SiO2/Si, izilinganiso eziphindaphindwayo ezingu-30, kubalwe u-1σ);
1.9 Ukunemba Kokujiya Kwefilimu Okuphelele: ≤0.5% (100nm SiO2/Si, umbiko we-metrology weqembu lesithathu unikeziwe); μm
1.10 Umsebenzi Wokumapha: Isebenzisa isigaba sokuskena esizenzakalelayo sohlobo lwe-x/y esinembile kakhulu, esisekela ukubeka okuzenzakalelayo kanye nokulinganisa ukuskena kwezingxenye ezingaphansi kwe-2/4/6/8-intshi, ngokunemba okuphindaphindwayo okungu-≤6μm, kanye nokukhiqizwa okukodwa kwamamephu okusabalalisa ubukhulu befilimu engu-2D/3D ngokuchofoza okukodwa;
1.11 Ukuthola Nokugxila Nge-Laser: Kubeka ngokuzenzakalelayo ubude be-focal kusetshenziswa indlela ye-laser reflection optical, ngokuhamba kwe-focus-finding ≤3mm;
1.12 Ububanzi Bokulinganisa Ubukhulu Befilimu: 1nm-10μm;
1.13 Imodeli Yomehluko: Ibala ngokuzenzakalelayo idatha yomehluko we-psi-diff kanye ne-delta-diff;
1.14 Isofthiwe Yokuhlaziya:
* Amandla Okulinganisa i-Spectroscopic: Izinto ezingu-16 ze-Mueller matrix ephelele, i-Psi/Delta polarization spectroscopy, i-N/C/S, i-depolarization, njll.;
* Amakhono Okuhlaziya Idatha: Iyakwazi ukuhlaziya ukujiya kanye nama-constant optical (n, k) wezinto zefilimu ezincane ze-isotropic kanye ne-anisotropic ezinezingqimba ezimbili kanye nezingqimba eziningi (kufika ezingqimbeni ezingu-20);
* Isekela amamodeli ama-optical constants, ukusatshalaliswa kwe-gradient ye-refractive index, imidiya elinganayo, ubulukhuni, njll., amafilimu amancane anezingxenye eziningi kanye nezinto zobuningi;
* Isekela amamodeli avamile e-optical constant kanye namamodeli avamile e-oscillator (imodeli ye-Cauchy, imodeli ye-Lorentz, imodeli ye-Gaussian, i-Drude, i-Sellmeier, njll.), futhi isekela ukufakwa kwemodeli ye-graphical multi-oscillator hybrid;
* Isekela ukukhipha izithombe ze-topographic ze-2D/3D, ukubuka idatha yomlando, kanye nokuthumela nokuhlela idatha kanye nemibiko ehambisanayo;
* Amafomethi Okukhipha Idatha: i-TXT, i-CSV, isithombe se-SNAP, i-raw spectrum, i-DAT, njll.;
* Isekela ukulinganiswa kokulibaziseka kwesigaba, ekwazi ukuhlola ukulibaziseka kwesigaba, i-angle ye-azimuth, i-angle yokujikeleza okubonakalayo, isilinganiso se-amplitude, ukuhleleka, njll.;
* Inomsebenzi wokuhlaziya isakhiwo se-grating esiphindaphindwayo se-1D/2D kanye nemisebenzi yokumodela.
2. Uhlu Lokucushwa:
1) Isethi eyodwa yeyunithi eyinhloko ye-ellipsometer;
2) Isethi eyodwa ngayinye yengalo ye-ellipsometry kanye nengalo yokuhlaziya;
3) Isethi eyodwa yesigaba sesampula esizenzakalelayo;
4) Isethi eyodwa yesofthiwe yokuhlaziya;
5) Isethi eyodwa yamaslayidi ajwayelekile;
6) Ikhompyutha eyodwa;
7) Isethi eyodwa yamathuluzi okulungisa amaphutha;
8) Isethi eyodwa yokuhlangana kwamabala amancane;
9) Iphampu eyodwa yokumunca i-vacuum;
10) Isigaba esisodwa sokuskena imephu.
3. Ikhompyutha Yokulinganisa Nokulawula
Isebenzisa i-PC yezimboni yezentengiselwano enesistimu yokusebenza ye-Windows 10; i-CPU: iprosesa ye-i7; Imemori: 15GB; I-Hard Disk: 1TB; Isikrini se-LCD: 24-intshi; ifaka igundane nekhibhodi.
4. Izidingo Zemvelo Namandla:
1) Izidingo Zeplatifomu: 2.0m (ubude) x 1.2m (ububanzi), umthamo womthwalo ongaphezu kuka-100kg (kunconywa ukuhlukaniswa kokudlidliza kokukhanya).
2) Ububanzi Bokushisa Kokusebenza: 20~30°C
3) Umswakama ohlobene: 35% ~ 60% RH
4) I-Voltage Yokunikezwa Kwamandla: 220VAC
5) Isigaba Samanje: Inani le-RMS elingaphansi kuka-4A (220VAC);
6) Amandla Aphezulu: 800W
Into Yokulinganisa i-Ellipsometry
Isimiso Sokulinganisa i-Ellipsometry
Inqubo Yokuhlaziya i-Ellipsometry
I-Muller Matrix Ellipsometry
I-Me-L Mueller Matrix Ellipsometry
I-ellipsometry ye-Mueller matrix enembile ngokugcwele ezenzakalelayo ngokuzenzakalelayo
Ukulungiswa kwe-engeli okuzenzakalelayo kanye nobuchwepheshe bokugxila, ukulinganisa okusheshayo ngokuchofoza okukodwa
Isixhumi esibonakalayo esisebenzisanayo somuntu nomshini esiqondiswayo, isipiliyoni sokusebenza kwesofthiwe esilula
Idathabheyisi yezinto ezibonakalayo ezicebile kanye nomtapo wolwazi wemodeli ye-algorithm, amakhono okuhlaziya idatha anamandla
Imininingwane Yobuchwepheshe
| Inombolo Yemodeli | ME-L |
| Izicelo | Ibanga Locwaningo/Lebhizinisi |
| Imisebenzi Eyisisekelo | I-Psi/Delta, i-R/T, i-Mueller Matrix, kanye nezinye izinzwa zokubona |
| Ukuhlaziywa kwe-Spectrum | 380-1000nm (isekela ukunwetshwa kufike ku-193-2500nm) |
| Isikhathi Sokulinganisa Esisodwa | ≤15s |
| Ukunemba Kokulinganisa Ukuphindaphinda | 0.005nm |
| Ukunemba Okuphelele (Umoya Wokulinganisa Ngokudlula) | Amapharamitha e-Ellipsometry: 4 = 45 ± 0.05°, A = 0 ± 0.1° I-Muller matrix: Isici esivundlile m = 10.005 Isici esingaphandle kwe-diagonal m = 0 ± 0.005 |
| Ukunemba Kokuphindaphinda Kwenkomba Yokubukeza | 0.0005 |
| Usayizi Wendawo | Usayizi wesikhala esikhulu: 2-4 mm Usayizi webala elincane: 200 μm/100 μm Usayizi wesikhala esincane kakhulu: 50 μm (kuye ngokuthi ubude besikhathi bungakanani) |
Inkomba yokunemba kokuphindaphinda isekelwe ezilinganisweni ezingu-30 eziphindaphindwayo zesampula ejwayelekile ye-100nm SiO2/Si;
Amapharamitha athile obuchwepheshe aleli thuluzi ahlobene namamojula asebenzayo kanye nezesekeli, futhi idatha ethebuleni ingeyokubhekisela kuphela.
Ukucushwa Ongakukhetha
| Ukukhethwa Kwebhendi | I-VN: 380-1650nm |
| I-V: 380-1000nm | I-UN: 210-1650nm |
| I-UV: 245-1000nm | I-DN: 193-1650nm |
| I-UV+: 210-1000nm | I-UN+: 210-2500nm |
| I-DUV: 193-1000nm | I-DN+: 193-2500nm |
Ukukhetha i-Engela
Okuqinile: 65°
Okuzenzakalelayo: 45-90°
Isandla: 45-90° (ukukhushulwa okungu-5°)
Ezinye Izinketho
Izinketho Zokumapha: 100*100mm/200*200mm
Isigaba Sokulawula Izinga Lokushisa: 190-550°C/RT-1000°C
Mayelana NATHI
Iphrofayela Yefektri
Kungani Sikhethe
Imibuzo Evame Ukubuzwa
Q1: Singobani?
A1: Yasungulwa ngo-2015, i-MSK (Tianjin) Cutting Technology CO.Ltd ikhule njalo futhi yadlula i-Rheinland ISO 9001
ukuqinisekiswa. Ngezikhungo zokugaya ze-SACCKE zaseJalimane ezine-axis ezinhlanu eziphezulu, isikhungo sokuhlola amathuluzi e-ZOLLER yaseJalimane esine-axis eziyisithupha, umshini we-Taiwan PALMARY kanye neminye imishini yokukhiqiza ethuthukisiwe yamazwe ngamazwe, sizibophezele ekukhiqizeni ithuluzi le-CNC elisezingeni eliphezulu, elinobungcweti nelisebenza kahle.
Q2: Ingabe uhweba ngenkampani noma umenzi?
A2: Siyimboni yamathuluzi e-carbide.
Umbuzo 3: Ungakwazi yini ukuthumela imikhiqizo ku-Forwarder yethu eShayina?
A3: Yebo, uma une-Forwarder eShayina, sizokujabulela ukumthumelela imikhiqizo.
UMBUZO 4: Yimiphi imigomo yokukhokha eyamukelekayo?
A4: Ngokuvamile siyayamukela i-T/T.
Q5: Uyawamukela yini ama-oda e-OEM?
A5: Yebo, i-OEM kanye nokwenza ngokwezifiso kuyatholakala, futhi siphinde sinikeze insizakalo yokuphrinta ilebula.
Q6: Kungani kufanele usikhethe?
A6:1) Ukulawula izindleko - ukuthenga imikhiqizo esezingeni eliphezulu ngentengo efanele.
2) Impendulo esheshayo - zingakapheli amahora angu-48, abasebenzi abangochwepheshe bazokunikeza ikhotheshini futhi babhekane nezinkinga zakho.
3) Ikhwalithi ephezulu - Inkampani ihlala ifakazela ngenhloso eqotho ukuthi imikhiqizo enikezayo ikhwalithi ephezulu ngokuphelele.
4) Isevisi yangemva kokuthengisa kanye nesiqondiso sobuchwepheshe - Inkampani inikeza isevisi yangemva kokuthengisa kanye nesiqondiso sobuchwepheshe ngokuya ngezidingo zamakhasimende kanye nezidingo zawo.
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