Ellipsometer ya Spectroscopic ifite imiterere ihanitse | Sisitemu yo gupima ubunini bwa filime nto kandi idasenya

Ellipsometer ya Spectroscopic ifite imiterere ihanitse | Sisitemu yo gupima ubunini bwa filime ntoya kandi idasenya Ishusho yagaragaye

Iyi ellipsometer ya spectroscopic ni sisitemu yo gupima neza cyane yagenewe kugaragaza filime nto n'ibikoresho byinshi mu buryo butangiza. Ishingiye ku mahame ya ellipsometric agezweho, ipima impinduka za polarization state (ikigereranyo cya amplitude Ψ n'itandukaniro rya phase Δ) kugira ngo itange ibipimo nyabyo by'urumuri n'ibipimo by'imiterere.

Ubunyangamugayo bwo gupima uko ibintu bisubirwamo:0.005nm

Ikirango:MSK

Igihe cyo gupima kimwe:≤amasegonda 15

Ohereza imeri kuri twe

Ibisobanuro birambuye ku gicuruzwa

Ibirango by'ibicuruzwa

Amabwiriza yo gutumiza

Bitewe n'imiterere yihariye y'igicuruzwa, igiciro kigaragara ku rupapuro ni igiciro cyo kubitsa, ntabwo ari igiciro nyacyo. Nyamuneka hamagara serivisi ishinzwe abakiriya kugira ngo ubahe ibiciro.

Amabwiriza atanzwe nta kintu na kimwe ashobora koherezwa! Murakoze ku bufatanye bwanyu! Kugira ngo mumenye byinshi ku bicuruzwa, nyamuneka hamagara serivisi ishinzwe abakiriya kugira ngo muhabwe udutabo tw'ibicuruzwa.

@mskcnctool #ellipmeter #filime ntoya #gukora ibikoresho bya semiconductor #metrologiya #gusiga irangi ry'amaso #ibikoresho bya label #urusobe rw'izuba #ikoranabuhanga ryo gukora #gupima neza ♬ ijwi ry'umwimerere - MSK CNC Tools

Ibipimo by'ingenzi

Ubunini bwa firime (kuva kuri imwe kugeza kuri nyinshi)

Igipimo cya Refractive Index (n) & Extinction Coefficient (k)

Icyuho cy'umukandara w'urumuri (Urugero)

Ubukana bw'ubuso

Ibintu by'ingenzi mu bya tekiniki

Interineti ya Wide Spectral: UV kuva kuri NIR kugira ngo habeho isesengura ry'ibikoresho bitandukanye

Ubushobozi bwo kugaragaza imiterere y'umubiri: Ishobora gupima filime nto cyane kugeza ku gipimo cya nanometero

Ntiyangiza cyangwa ngo ikoreshwe: Ni nziza ku bipimo by’ubuhanga mu bushakashatsi no mu iterambere ndetse no mu mikorere y’ibicuruzwa.

Porogaramu yo Gutunganya Ibishushanyo Iteye Imbere: Ishyigikira isesengura ry’ibice byinshi rigoye hamwe n’imikorere yoroshye kuyikoresha

Porogaramu

Ubu buryo bukoreshwa cyane mu gukora ibikoresho bya semiconductor, gusiga irangi ry’urumuri, kwerekana ahantu harambuye, guteza imbere selile z’izuba, ubushakashatsi ku bikoresho, no kugenzura imiterere y’ibinyabuzima.

Kuki twahitamo igisubizo cyacu?

Nk'inganda z'inzobere zifite ubushobozi bwo gukora ubushakashatsi n'iterambere, dutanga ibiciro bitaziguye mu ruganda, imiterere ihinduka, ndetse n'ubufasha bwihariye mu bya tekiniki. Waba ukeneye sisitemu yo gusesengura muri laboratwari cyangwa igisubizo cyo kugenzura umusaruro, dushobora guhindura igikoresho kugira ngo gihuze n'ibyo ukeneye mu gupima.

Saba igiciro

Twandikire uyu munsi kugira ngo tuganire ku busabe bwawe cyangwa usabe ikiguzi. Itsinda ryacu ritanga inama z'ikoranabuhanga ku buntu kugira ngo rigufashe guhitamo igisubizo cyiza cyo gupima filime nto.

Ibipimo by'ingenzi bya tekiniki

1. Ubushobozi bwo gupima: Ibintu bya Mueller matrix byo ku rwego rwa 16, spectrum ya polarization Psi/Delta, index ya refractive, ubunini, birefringence, na dielectric constant, nibindi.

2. Intera ya Spectral: 210nm-1690nm

3. Intera y'uburebure bw'umuraba: ≤0.8nm@210-1000nm, ≤3.5nm@1000-1690nm

4. Igihe cyo gupima amanota amwe: ≤ 10s

5. Ingano y'akadomo gato: ≤200μm

6. Ikoranabuhanga ryo Guhindura Imiterere: Uburyo bwo guhindura sisitemu ya PCSCA ifite imiyoboro ibiri izunguruka

7. Icyiciro cy'icyitegererezo cyikora: Kwibanda ku buryo bwikora kuri Z-axis, urugendo ntarengwa rwa 18mm, intambwe ntarengwa ya 1µm

8. Uburinganire bwo gusubiramo ubunini bwa filime: ≤0.005nm (100nm SiO2/Si, ibipimo 30 bisubirwamo, bibarwa nka 1σ)

9. Ubuziranenge bwo gusubiramo igipimo cya refractive index: ≤0.0002 (100nm SiO2/Si, ibipimo 30 bisubiwemo, bibarwa nka 1σ)

10. Uburinganire bwa filime busesuye: ≤0.5% (100nm SiO2/Si, raporo y'ibipimo by'umuntu wa gatatu yatanzwe)

11. Imikorere yo gushushanya: Ikoresha uburyo bwo gusesengura bwikora bwa x/y, ishyigikira uburyo bwo gupima no gupima imiterere ya 2/4/6/8-inch, uburyo bwo gusubiramo ≤6μm, gukora amakarita yo gukwirakwiza 2D/3D ubunini bwa filimi rimwe gusa.

12. Gutandukanya no gushimangira hakoreshejwe laser: Gushyira ahantu hifashishijwe uburebure bwa focal hakoreshejwe laser reflection optical, ingendo zibanda ku ngendo ≤3mm

13. Icyitegererezo cy'itandukaniro: Ibara mu buryo bwikora amakuru y'itandukaniro rya psi-diff na delta-diff

14. Porogaramu yo gusesengura: Ifite nibura uburyo 5 butandukanye bwo gupima, ububiko bw’amakuru bwa n/k bwubatswemo ibikoresho birenga 100 by’ikoranabuhanga, kandi ishyigikira gukora ububiko bw’amakuru bwihariye; ifite ubushobozi bwo gupima no gusesengura imiterere y’amakuru ku buryo bworoshye bwo gukora urwego rumwe, urwego rwinshi (kugeza ku byiciro 30), na filime nto zihuza imiterere, harimo imiterere ya cauchy, Sellmeier, Tauc-Lorentz, Bspline, na Oscillator, kandi ishyigikira uburenganzira bwo gukoresha porogaramu zidafite aho zihuriye n’ikoranabuhanga.

Ibisobanuro bya tekiniki

I. Intangiriro y'Ibikoresho

ME-Mapping Spectroellipsometry ifite ikoranabuhanga rya modulation ya dual-rotation compensator rihujwe na algorithme yo gusesengura amakuru neza cyane. Ishobora kubona ibintu byose 16 bya Mueller matrix yose na polarisation spectrum mu gipimo kimwe, bigatuma icyitegererezo gipimwa vuba kandi kitangiza. Igikoresho gifite imiterere ihamye y'inzira y'amajwi kandi gikoresha detector ikonjeshwa na semiconductor, kibona ibimenyetso by'ubukana bw'urumuri mu masegonda make. Gitanga umuvuduko wihuse wo gupima no gutungana cyane, gishyigikira gupima neza ibipimo nk'ubugari, index ya refractive, coefficient yo kuzimira, na optical dielectric constant ku bikoresho bitandukanye bya filime nto. Byongeye kandi, ishobora guhindurwa hakoreshejwe "wafer repeatable positioning stages" zingana zitandukanye kugira ngo hapimwe multi-point mapping scanning y'ibipimo bitandukanye binini.

II. Ingano y'Ikoreshwa

Ellipometrists zikoreshwa cyane cyane mu byuma bipima urumuri, ibikoresho byerekana urumuri, photovoltaics z'izuba, filime z'urumuri, itumanaho ry'urumuri, n'ibikoresho bya nanomaterials.

III. Ibisabwa muri rusange mu bya tekiniki

1. Ibisobanuro bya tekiniki:
1.1 Ibipimo by'ibipimo: Ibintu bya Mueller matrix byo mu rwego rwa 16, Psi/Delta, index refractive, ubunini, birefringence, na dielectric constant, nibindi.
1.2 Intera ya Spectral: 210nm-1690nm;
1.3 Igihe cyo gupima ingingo imwe: ≤ 10s;
1.4 Ingano ya Microspot: ≤200μm;
1.5 Ikoranabuhanga ryo Guhindura Imiterere: Guhindura uburyo bwo guhinduranya imikoreshereze ya PC1SCA inshuro ebyiri;
1.6 Icyiciro cy'icyitegererezo cyikora: Gishyigikira kwibanda ku murongo wa z, urugendo ntarengwa rwa 18mm, intambwe ntarengwa ya 1μm;
1.7 Ubunini bwa firime Gusubiramo Ubuziranenge: ≤0.005nm (100nm SiO2/Si, ibipimo 30 bisubiwemo, byabazwe 1σ);
1.8 Ubuziranenge bwo gusubiramo igipimo cya Refractive Index: ≤0.0002 (100nm SiO2/Si, ibipimo 30 bisubiwemo, byabazwe 1σ);
1.9 Uburinganire bwa Filime yuzuye: ≤0.5% (100nm SiO2/Si, raporo y'ibipimo by'umuntu wa gatatu yatanzwe); μm
1.10 Imikorere yo Gushushanya: Ikoresha icyiciro cyo gusesengura cyikora cya x/y, gishyigikira uburyo bwo gupima no gupima imiterere ya 2/4/6/8-inch, gifite ubushobozi bwo gusubiramo ≤6μm, hamwe no gukora amakarita yo gukwirakwiza 2D/3D ubunini bwa filime rimwe gusa;
1.11 Gushakisha no Gushyira ku murongo wa Laser: Bishyira mu buryo bwikora uburebure bw'ibanze hakoreshejwe inzira ya laser reflection optique, hamwe n'urugendo rwo gushakisha ku murongo ≤3mm;
1.12 Ubunini bwa firime Ingano yo gupima: 1nm-10μm;
1.13 Icyitegererezo cy'Itandukaniro: Ibara mu buryo bwikora amakuru y'itandukaniro rya psi-diff na delta-diff;
1.14 Porogaramu yo gusesengura:
* Ubushobozi bwo gupima Spectroscopic: Ibintu 16 bya matrix yuzuye ya Mueller, spectroscopy ya Psi/Delta polarization, N/C/S, depolarization, nibindi;
* Ubushobozi bwo gusesengura amakuru: Ishobora gusesengura ubunini n'ibipimo by'urumuri (n, k) by'ibikoresho bya filime ntoya ya isotropic na anisotropic ifite urwego rumwe n'izindi nyinshi (kugeza ku byiciro 20);
* Ishyigikira moderi za optique constants, refractive index gradient distribution, equivalent media, roughness, nibindi, bya filime nini zifite ibice byinshi nibikoresho byinshi;
* Ishyigikira moderi zisanzwe za optique na moderi zisanzwe za oscillator (model ya Cauchy, moderi ya Lorentz, moderi ya Gaussian, Drude, Sellmeier, nibindi), kandi ishyigikira imiterere ya graphical multi-oscillator hybrid fitting;
* Ishyigikira gusohora amashusho ya 2D/3D, kureba amakuru y'amateka, no kohereza no gutunganya amakuru hamwe na raporo zijyanye nayo;
* Imiterere y'amakuru asohoka: TXT, CSV, SNAP snapshot, raw spectrum, DAT, nibindi;
* Ishyigikira gupima gutinda kw'ibyiciro, ishobora gupima gutinda kw'ibyiciro, inguni ya azimuth, inguni yo kuzunguruka kw'urumuri, igipimo cy'ubwinshi bw'amajwi, urutonde, nibindi;
* Ifite imikorere yo gusesengura imiterere y’ibice bya 1D/2D n’uburyo bwo kubigaragaza.

2. Urutonde rw'igenamiterere:

1) Itsinda rimwe ry'icyuma gipima ellipsometer;

2) Seti imwe ya buri ruhande rw'ukuboko kwa ellipsometry n'ukuboko kwa analyzer;

3) Itsinda rimwe ry'icyiciro cy'icyitegererezo cyikora;

4) Porogaramu imwe y'isesengura;

5) Itsinda rimwe ry'ama-slide asanzwe;

6) Mudasobwa imwe;

7) Itsinda rimwe ry'ibikoresho byo gukemura ibibazo;

8) Itsinda rimwe ry'ibikoresho byo guteranya uduce duto;

9) Pompe imwe yo kuvomera amazi mu cyuma gishyuha;

10) Icyiciro kimwe cyo gusesengura ikarita.

3. Mudasobwa yo gupima no kugenzura

Ikoresha mudasobwa y'ubucuruzi ifite sisitemu y'imikorere ya Windows 10; CPU: poroseseri ya i7; Memory: 15GB; Disiki ikomeye: 1TB; LCD monitor: 24-inch; irimo imbeba na clavier.

4. Ibisabwa ku bidukikije n'ingufu:

1) Ibisabwa kuri Platform: 2.0m (uburebure) x 1.2m (ubugari), ubushobozi bwo gutwara ibintu burenga 100kg (ni ngombwa ko habaho kwitandukanya n'ingufu zo mu mucyo).
2) Ingano y'ubushyuhe mu mikorere: 20~30°C
3) Ubushuhe: 35% ~ 60% RH
4) Ingufu z'amashanyarazi: 220VAC
5) Umuvuduko w'amashanyarazi: Agaciro ka RMS kari munsi ya 4A (220VAC);
6) Ingufu ntarengwa: 800W

Ikintu cyo gupima Ellipsometry

Ibikoresho byo gusesengura muri laboratwari

Ihame ryo gupima Ellipsometry

Uburyo bwo gusesengura Ellipsometry

Ellipsometry ya Muller Matrix

Ellipsometer ya Spectroscopic yo gukoresha filime nto

ME-L Mueller Matrix Ellipsometry

Isuzuma ry’imiterere y’inyuma ya Mueller matrix ellipsometry ryikora ku buryo bwikora kandi bunoze

Guhindura inguni no gupima byikora, gupima byihuse ukanze rimwe gusa

Uburyo bwo guhuza abantu n'imashini buyobowe, uburyo bworoshye bwo gukoresha porogaramu

Ububiko bw'amakuru bw'ibikoresho byinshi n'isomero ry'icyitegererezo cya algorithm, ubushobozi bukomeye bwo gusesengura amakuru

Ibisobanuro bya tekiniki

Nimero y'icyitegererezo	ME-L
Porogaramu	Impamyabumenyi y'Ubushakashatsi/Ubucuruzi
Imirimo y'ibanze	Psi/Delta, R/T, Mueller Matrix, n'izindi sensors z'urumuri
Isesengura rya Spectrum	380-1000nm (ishyigikira kwaguka kugeza kuri 193-2500nm)
Igihe cyo gupima kimwe	≤amasegonda 15
Ubunyangamugayo bwo gupima uko ibintu bisubirwamo	0.005nm
Ubuziranenge bwuzuye (Umwotsi unyura mu bipimo)	Ibipimo bya Ellipsometry: 4 = 45 ± 0.05°, A = 0 ± 0.1° Matirike ya Muller: Igice cy'umurambararo m = 10.005 Igice kitari ku ruhande rw'umurambararo m = 0 ± 0.005
Ubuziranenge bwo gusubiramo igipimo cya Refractive Index	0.0005
Ingano y'ahantu	Ingano nini y'ahantu: mm 2-4 Ingano nto y'agace: 200 μm/100 μm Ingano y'agace gato cyane: 50 μm (biterwa n'uburebure bw'umurambararo)

Igipimo cy’ubuziranenge bwo gusubiramo gishingiye ku bipimo 30 bishobora gusubiramo by’icyitegererezo gisanzwe cya 100nm SiO2 / Si;

Ibipimo bya tekiniki byihariye by'igikoresho bifitanye isano n'imikorere nyayo n'ibindi bikoresho, kandi amakuru ari mu mbonerahamwe ni ayo kwifashisha gusa.

Imiterere idasabwa

Guhitamo amatsinda	VN: 380-1650nm
V: 380-1000nm	Umuryango w'Abibumbye: 210-1650nm
UV: 245-1000nm	DN: 193-1650nm
UV+: 210-1000nm	UN+: 210-2500nm
DUV: 193-1000nm	DN+: 193-2500nm

Guhitamo inguni

Ubushyuhe buhamye: 65°
Ubushyuhe bwikora: 45-90°
Igitabo cy'amabwiriza: 45-90° (inyongera 5°)

Andi mahitamo

Amahitamo yo gushushanya: 100 * 100mm / 200 * 200mm

Icyiciro cyo Kugenzura Ubushyuhe: 190-550°C/RT-1000°C

Ku bijyanye natwe

Yashinzwe mu 2015, MSK (Tianjin) International Trading CO., Ltd yakomeje gukura no kweguka.Rheinland ISO 9001 kwemezaDufite ibigo byo gusya byo mu Budage bifite amashami atanu yo mu rwego rwo hejuru, ikigo cyo kugenzura ibikoresho byo mu Budage bifite amashami atandatu ya ZOLLER, imashini ya Taiwan PALMARY n'ibindi bikoresho mpuzamahanga bigezweho, twiyemeje gukoraumuhanga mu by'ubuhanga kandi ukora nezaIgikoresho cya CNC.

Umwihariko wacu ni ugushushanya no gukora ibikoresho byose byo gukata karubide ikomeye:Inganda zikora ibyuma, imashini zitobora, imashini zikoresha amazi, amarobine n'ibikoresho byihariye.Filozofiya yacu y'ubucuruzi ni uguha abakiriya bacu ibisubizo birambuye binoza imikorere y'ubukorikori, byongera umusaruro, kandi bigabanya ikiguzi.Serivisi + Ubwiza + ImikorereItsinda ryacu ry’abajyanama ritanga kandiubumenyi mu gutunganya, hamwe n'uburyo butandukanye bwo gutanga ibisubizo bifatika n'ikoranabuhanga kugira ngo bifashe abakiriya bacu kugera mu mutekano mu gihe kizaza cy'inganda 4.0. Kugira ngo ubone amakuru arambuye ku gice icyo ari cyo cyose cy'ikigo cyacu, turagusabashakisha urubuga rwacu orkoresha igice cya "Twandikire"kugira ngo tubone amakuru ku ikipe yacu mu buryo butaziguye.

Umwirondoro w'uruganda

Kuki twahitamo

agace gakata ka karubide gakoresha imiyoboro izenguruka

Ibibazo Bikunze Kubazwa

Q1: Turi bande?

A1: Yashinzwe mu 2015, MSK (Tianjin) Cutting Technology CO.Ltd yakomeje gukura no gutsinda Rheinland ISO 9001
kwemeza. Dufite ibigo byo gusya byo mu Budage bya SACCKE bifite amashami atanu, ikigo cyo kugenzura ibikoresho byo mu Budage bya ZOLLER bifite amashami atandatu, imashini ya Taiwan PALMARY n'ibindi bikoresho mpuzamahanga bigezweho, twiyemeje gukora ibikoresho bya CNC bifite imiterere ihanitse, by'umwuga kandi bikora neza.

Q2: Uri ikigo cy'ubucuruzi cyangwa uruganda?

A2: Turi uruganda rw'ibikoresho bya karubide.

Q3: Ese ushobora kohereza ibicuruzwa kuri Forwarder yacu mu Bushinwa?

A3: Yego, niba ufite Forwarder mu Bushinwa, tuzishimira kumwoherereza ibicuruzwa.

Q4: Ni ibihe biteganyijwe mu kwishyura byemewe?

A4: Ubusanzwe twemera T/T.

Q5: Ese wemera amabwiriza ya OEM?

A5: Yego, OEM na customization birahari, kandi dutanga serivisi yo gucapa labels.

Q6: Kuki mukwiye kuduhitamo?

A6:1) Kugenzura ikiguzi - kugura ibicuruzwa byiza ku giciro gikwiye.

2) Igisubizo cyihuse - mu masaha 48, abakozi b'inzobere bazaguha ikiguzi kandi bakemure ibibazo byawe.

3) Ubwiza bwo hejuru - Isosiyete ihora igaragaza ku bushake bwayo ko ibicuruzwa itanga ari 100% by'ubwiza bwo hejuru.

4) Serivisi nyuma yo kugurisha n'ubuyobozi bwa tekiniki - Isosiyete itanga serivisi nyuma yo kugurisha n'ubuyobozi bwa tekiniki hakurikijwe ibyo abakiriya bakeneye n'ibyo bakeneye.

Ibanjirije iyi: Igikoresho cyo gupima neza cyane SP1000 | Igipimo cya 2D cy'imiterere n'ubuso bw'ubukonje

Ibikurikira: Igenzura rya Laser Rinini Rigendanwa | Sisitemu yo Gupima mu Nganda ya 3D Ifite Ubuziranenge Buhanitse