Tsarin Ma'aunin Ellipsometer Mai Inganci Mai Kyau | Tsarin Ma'aunin Fim Mai Sirara Mai Kauri da Haske Mai Rage Haske

Aikace-aikace

Ana amfani da wannan tsarin sosai a masana'antar semiconductor, murfin gani, nunin faifai mai faɗi, haɓaka hasken rana (ƙwayoyin hasken rana), binciken kimiyyar kayan aiki, da kuma nazarin halittu.

Me Yasa Zabi Maganinmu

A matsayinmu na ƙwararren masana'anta mai ƙarfin R&D, muna bayar da farashi kai tsaye daga masana'anta, saitunan da za a iya gyarawa, da kuma tallafin fasaha na musamman. Ko kuna buƙatar tsarin benchtop don nazarin dakin gwaje-gwaje ko mafita ta layi don sa ido kan samarwa, za mu iya daidaita kayan aikin bisa ga takamaiman buƙatunku na aunawa.

Nemi Ƙimar Kuɗi

Tuntube mu a yau don tattauna aikace-aikacenku ko neman farashi. Ƙungiyarmu tana ba da shawarwari na fasaha kyauta don taimaka muku zaɓar mafi kyawun mafita don auna fim ɗin siriri.

Babban Sigogi na Fasaha

1. Ƙarfin Aunawa: Abubuwan matrix na Mueller na tsari na 16, bakan polarization Psi/Delta, ma'aunin refractive, kauri, birefringence, da kuma dielectric constant, da sauransu.

2. Nisan Bakan: 210nm-1690nm

3. Tazarar Raƙuman Ruwa: ≤0.8nm@210-1000nm, ≤3.5nm@1000-1690nm

4. Lokacin Auna Maki Guda Ɗaya: ≤10s

5. Ƙananan tabo Girman: ≤200μm

6. Fasahar Sauya Sauyi: Tsarin daidaita tsarin daidaitawar PCSCA mai juyawa biyu

7. Matakan Samfura na atomatik: Mayar da hankali ta atomatik na Z-axis, matsakaicin tafiya 18mm, mafi ƙarancin mataki 1µm

8. Daidaiton maimaita kauri na fim: ≤0.005nm (100nm SiO2/Si, ma'auni 30 da aka maimaita, an ƙididdige su azaman 1σ)

9. Daidaiton maimaitawar ma'aunin haske: ≤0.0002 (100nm SiO2/Si, ma'auni 30 da aka maimaita, an ƙididdige su azaman 1σ)

10. Cikakken daidaiton kauri na fim: ≤0.5% (100nm SiO2/Si, rahoton metrology na ɓangare na uku ya bayar)

11. Aikin taswirar taswira: Yana amfani da matakin duba ta atomatik mai inganci irin x/y, yana tallafawa matsayi ta atomatik da auna ma'aunin duba taswira na inci 2/4/6/8, daidaiton maimaitawa ≤6μm, ƙirƙirar taswirar rarraba fim ɗin 2D/3D mai kauri sau ɗaya

12. Range da mayar da hankali na Laser: Sanya tsawon mayar da hankali ta atomatik ta hanyar hasken laser, mai da hankali kan tafiya ≤3mm

13. Tsarin Bambanci: Yana ƙididdige bayanan bambancin psi-diff da delta-diff ta atomatik

14. Manhajar nazari: Tana da aƙalla hanyoyin aunawa daban-daban guda 5, rumbun adana bayanai na n/k da aka gina a ciki don kayan gani sama da 100, kuma tana tallafawa ƙirƙirar rumbun adana bayanai na musamman; tana da damar gwaji da yin samfuri don ƙirar faifai ɗaya, mai layuka da yawa (har zuwa layuka 30), da kuma fina-finai masu sirara masu haɗawa, gami da samfuran cauchy, Sellmeier, Tauc-Lorentz, Bspline, da Oscillator, kuma tana tallafawa lasisin software na layi.

Bayanan Fasaha

I. Gabatarwar Kayan Aiki

Tsarin ME-Mapping Spectroellipsometry yana da fasahar daidaitawa mai juyawa biyu tare da manyan hanyoyin nazarin bayanai. Yana iya samun dukkan abubuwa 16 na cikakken matrix na Mueller da kuma bakan polarization a cikin ma'auni ɗaya, wanda ke ba da damar auna samfurin cikin sauri da mara lalata. Kayan aikin yana da ƙirar hanyar gani mai ƙarfi kuma yana amfani da na'urar gano haske mai sanyaya semiconductor, yana samun siginar ƙarfin haske cikin daƙiƙa. Yana ba da saurin saurin aunawa da daidaito mafi girma, yana tallafawa ma'aunin daidai na sigogi kamar kauri, ma'aunin haske, ma'aunin ƙarewa, da madaidaicin dielectric na gani don kayan fim masu siriri daban-daban. Bugu da ƙari, ana iya keɓance shi da girman "matakan matsayi masu maimaitawa na wafer" don ma'aunin taswirar maki da yawa na manyan samfura daban-daban.