Ellipsometer Yodziwika Bwino Kwambiri | Njira Yoyezera Filimu Yoonda Yosawononga & Dongosolo Loyezera Chizindikiro Chosawonongeka

Ellipsometer Yodziwika Bwino Kwambiri | Kukhuthala Kwa Filimu Yoonda Kwambiri & Dongosolo Loyezera Chizindikiro Chosawononga Chithunzi Chowonetsedwa

Choyezera kuwala ichi cha spectroscopic ndi njira yolondola kwambiri yoyezera kuwala yomwe idapangidwira kufotokozera mafilimu owonda ndi zinthu zazikulu zomwe sizingawononge. Kutengera mfundo zapamwamba za ellipsometry, imayesa kusintha kwa polarization state (amplitude ratio Ψ ndi phase difference Δ) kuti ipereke zokhazikika zolondola za kuwala ndi magawo a kapangidwe kake.

Kulondola kwa Muyeso Wobwerezabwereza:0.005nm

Mtundu:MSK

Nthawi Yoyezera Imodzi:≤masekondi 15

Tumizani imelo kwa ife

Tsatanetsatane wa Zamalonda

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Malangizo Oyitanitsa

Chifukwa cha mtundu wapadera wa malonda, mtengo womwe wawonetsedwa patsamba lino ndi mtengo woikidwiratu, osati mtengo weniweni. Chonde funsani chithandizo cha makasitomala kuti akupatseni mtengo.

Maoda omwe aperekedwa mwachindunji popanda kulumikizana kale sangatumizidwe! Zikomo chifukwa cha mgwirizano wanu! Kuti mudziwe zambiri za malonda, chonde funsani makasitomala kuti mulandire timabuku ta malonda.

@mskcnctool #ellipsometer #filimu yopyapyala #kupanga zinthu zoyezera mphamvu #metrology #chophimba maso #zipangizo zolembera #selo la dzuwa #ukadaulo wopanga #muyeso wolondola ♬ original sound - MSK CNC Tools

Miyeso Yofunika Kwambiri

Kukhuthala kwa Filimu (kuyambira pa imodzi mpaka pa multilayer)

Chizindikiro Chowunikira (n) & Choyezera Kutha (k)

Mpata wa Band Yowonekera (Mwachitsanzo)

Kuuma kwa pamwamba

Mfundo Zaukadaulo

Wide Spectral Range: Kuphimba kwa UV mpaka NIR kuti kusanthula zinthu kukhale kosiyanasiyana

Kuzindikira Kwambiri: Kutha kuyeza mafilimu owonda kwambiri mpaka kufika pa sikelo ya sub-nanometer

Yosakhudzana ndi Yosawononga: Yabwino kwambiri pa zitsanzo zodziwika bwino mu kafukufuku ndi chitukuko ndi malo opangira zinthu.

Mapulogalamu Otsogola Opangira Ma Modeli: Amathandizira kusanthula kovuta kwa ma stack okhala ndi zigawo zambiri ndi ntchito zosavuta kugwiritsa ntchito

Mapulogalamu

Dongosololi limagwiritsidwa ntchito kwambiri popanga zinthu monga semiconductor, optical coating, flat panel displays, photovoltaic (solar cell), kufufuza za sayansi ya zinthu, ndi biosensing.

Chifukwa Chosankha Yankho Lathu

Monga wopanga waluso wokhala ndi luso lamphamvu la R&D, timapereka mitengo yolunjika kuchokera ku fakitale, makonzedwe osinthika, komanso chithandizo chaukadaulo chodzipereka. Kaya mukufuna njira yowunikira labotale kapena yankho lolunjika lowunikira kupanga, titha kusintha chidacho kuti chigwirizane ndi zosowa zanu.

Pemphani Mtengo

Lumikizanani nafe lero kuti mukambirane za fomu yanu yofunsira kapena kupempha mtengo. Gulu lathu limapereka upangiri waukadaulo waulere kuti likuthandizeni kusankha njira yabwino kwambiri yoyezera filimu yopyapyala.

Magawo Akuluakulu Aukadaulo

1. Kuthekera kwa Muyeso: Zinthu za Mueller matrix za 16th order, polarization spectrum Psi/Delta, refractive index, makulidwe, birefringence, ndi dielectric constant, ndi zina zotero.

2. Mtundu wa Spectral: 210nm-1690nm

3. Kutalikirana kwa Mafunde: ≤0.8nm@210-1000nm, ≤3.5nm@1000-1690nm

4. Nthawi Yoyezera Malo Amodzi: ≤ masekondi 10

5. Kukula kwa malo ang'onoang'ono: ≤200μm

6. Ukadaulo Wosintha Zinthu: PCSCA dual rotary compensator system modulation

7. Gawo la Chitsanzo Chokha: Z-axis yokha yokhazikika, kuyenda kwakukulu 18mm, sitepe yocheperako 1µm

8. Kulondola kobwerezabwereza kwa makulidwe a filimu: ≤0.005nm (100nm SiO2/Si, miyeso 30 yobwerezabwereza, yowerengedwa ngati 1σ)

9. Kulondola kwa kubwerezabwereza kwa index ya refractive: ≤0.0002 (100nm SiO2/Si, miyeso 30 yobwerezabwereza, yowerengedwa ngati 1σ)

10. Kulondola kwathunthu kwa makulidwe a filimu: ≤0.5% (100nm SiO2/Si, lipoti la metrology la chipani chachitatu laperekedwa)

11. Ntchito yojambula mapu: Imagwiritsa ntchito gawo lolondola kwambiri la x/y lojambula lokha, imathandizira kuyimitsa ndi kuyesa kusanthula kwa magawo a 2/4/6/8-inch, kulondola kobwerezabwereza ≤6μm, kupanga mamapu ogawa makulidwe a 2D/3D kamodzi kokha.

12. Kuyang'ana ndi kuyang'ana pa laser: Kuyika kutalika kokhazikika kudzera pa laser reflection optical path, kuyang'ana pa ulendo ≤3mm

13. Chitsanzo cha kusiyana: Chimawerengera zokha deta ya kusiyana kwa psi-diff ndi delta-diff

14. Mapulogalamu owunikira: Ali ndi njira zosachepera zisanu zoyezera, database yomangidwa mkati ya n/k ya zinthu zopitilira 100 zowunikira, ndipo imathandizira kupanga ma database apadera; ili ndi luso loyesa ndi kusanthula ma modeli a single-layer, multi-layer (mpaka 30 layers), ndi mafilimu opyapyala osakanikirana, kuphatikizapo cauchy, Sellmeier, Tauc-Lorentz, Bspline, ndi Oscillator models, ndipo imathandizira mapulogalamu oletsa kugwiritsa ntchito intaneti.

Mafotokozedwe Aukadaulo

I. Chiyambi cha Zida

ME-Mapping Spectroellipsometry ili ndi ukadaulo wosinthira wa dual-rotation compensator pamodzi ndi ma algorithms olondola kwambiri osanthula deta. Imatha kupeza zinthu zonse 16 za Mueller matrix yonse ndi polarization spectrum muyeso umodzi, zomwe zimathandiza kuyeza mwachangu komanso kosawononga chitsanzo. Chidachi chili ndi kapangidwe kokhazikika ka njira yowunikira ndipo chimagwiritsa ntchito chowunikira choziziritsidwa ndi semiconductor, kupeza zizindikiro zamphamvu za kuwala mkati mwa masekondi. Chimapereka liwiro loyesa mwachangu komanso kulondola kwambiri, kuthandizira kuyeza molondola kwa magawo monga makulidwe, refractive index, extinction coefficient, ndi optical dielectric constant pazinthu zosiyanasiyana zopyapyala za filimu. Kuphatikiza apo, ikhoza kusinthidwa ndi "wafer repeatable positioning stages" za kukula kosiyana kuti muyeze mapping scanning ya multi-point ya zitsanzo zazikulu zosiyanasiyana.

II. Chiwerengero cha Ntchito

Ma ellipsometrists amagwiritsidwa ntchito makamaka mu ma semiconductors, flat panel displays, solar photovoltaics, optical thin films, optical communications, ndi nanomaterials.

III. Zofunikira Zonse Zaukadaulo

1. Mafotokozedwe Aukadaulo:
1.1 Ma Parameters a Muyeso: Zinthu za Mueller matrix za dongosolo la 16, Psi/Delta, refractive index, makulidwe, birefringence, ndi dielectric constant, ndi zina zotero.
1.2 Mtundu wa Spectral: 210nm-1690nm;
1.3 Nthawi Yoyezera ya Pointi Imodzi: ≤10s;
1.4 Kukula kwa Microspot: ≤200μm;
1.5 Ukadaulo Wosintha Zinthu: PC1SCA kusintha kwa kasinthasintha kawiri;
1.6 Gawo la Zitsanzo Zokha: Limathandizira kuyang'ana kwa z-axis zokha, kuyenda kwakukulu 18mm, sitepe yocheperako 1μm;
1.7 Kuchuluka kwa Filimu Kubwerezabwereza Kulondola: ≤0.005nm (100nm SiO2/Si, miyeso 30 yobwerezabwereza, yowerengedwa 1σ);
1.8 Kulondola kwa Kubwerezabwereza kwa Refractive Index: ≤0.0002 (100nm SiO2/Si, miyeso 30 yobwerezabwereza, yowerengedwa 1σ);
1.9 Kulondola kwa Kukhuthala kwa Filimu: ≤0.5% (100nm SiO2/Si, lipoti la metrology la chipani chachitatu laperekedwa); μm
1.10 Ntchito Yojambula Mapu: Imagwiritsa ntchito gawo lojambula lodziwikiratu la x/y, lothandizira kuyimitsa ndi kuyesa kwa ma substrates a 2/4/6/8-inch, lolondola kubwerezabwereza ≤6μm, komanso kupanga mamapu ogawa makulidwe a filimu ya 2D/3D kamodzi kokha;
1.11 Kufufuza ndi Kuyang'ana pa Laser: Kuyika kutalika kwa focal pogwiritsa ntchito njira yowunikira ya laser, yokhala ndi njira yowunikira yowunikira ≤3mm;
1.12 Kuchuluka kwa Mafilimu Kuyeza Mtundu: 1nm-10μm;
1.13 Chitsanzo Chosiyana: Chimawerengera zokha deta ya kusiyana kwa psi-diff ndi delta-diff;
1.14 Mapulogalamu Ofufuza:
* Kutha Kuyeza kwa Spectroscopic: Zinthu 16 za Mueller matrix yonse, Psi/Delta polarization spectroscopy, N/C/S, depolarization, ndi zina zotero;
* Kutha Kusanthula Deta: Kutha kusanthula makulidwe ndi zokhazikika za kuwala (n, k) za zipangizo za filimu yopyapyala ya isotropic ndi anisotropic yokhala ndi gawo limodzi ndi layer yambiri (mpaka zigawo 20);
* Imathandizira mitundu ya ma optical constants, refractive index gradient distribution, equivalent media, roughness, etc., ya multi-component thin films ndi bulk materials;
* Imathandizira ma common optical constant models ndi ma common oscillator models (Cauchy model, Lorentz model, Gaussian model, Drude, Sellmeier, etc.), ndipo imathandizira graphical multi-oscillator hybrid model fitting;
* Imathandizira kutulutsa zithunzi za 2D/3D, kuwona deta yakale, ndi kutumiza ndikusintha deta ndi malipoti ofanana;
* Mafomu Otulutsa Deta: TXT, CSV, SNAP snapshot, raw spectrum, DAT, ndi zina zotero;
* Imathandizira kuyeza kuchedwa kwa gawo, yokhoza kuyesa kuchedwa kwa gawo, ngodya ya azimuth, ngodya yozungulira yowala, chiŵerengero cha ma amplitude, dongosolo, ndi zina zotero;
* Ali ndi ntchito zowunikira kapangidwe ka grating ndi modeling za 1D/2D nthawi ndi nthawi.

2. Mndandanda wa Zokonzera:

1) Seti imodzi ya chipangizo chachikulu cha ellipsometer;

2) Seti imodzi ya mkono wa ellipsometry ndi mkono wowunikira;

3) Seti imodzi ya gawo lodziyimira lokha;

4) Seti imodzi ya mapulogalamu owunikira;

5) Seti imodzi ya masilaidi wamba;

6) Kompyuta imodzi;

7) Zida zochotsera mavuto pogwiritsa ntchito njira imodzi;

8) Seti imodzi ya msonkhano wa micro-spot;

9) Pampu imodzi yothira madzi otayira mpweya;

10) Gawo limodzi lofufuza mapu.

3. Kompyuta Yoyezera ndi Kulamulira

Imagwiritsa ntchito PC yamakampani yamalonda yokhala ndi makina ogwiritsira ntchito a Windows 10; CPU: purosesa ya i7; Memory: 15GB; Hard Disk: 1TB; LCD monitor: 24-inch; ili ndi mbewa ndi kiyibodi.

4. Zofunikira pa Zachilengedwe ndi Mphamvu:

1) Zofunikira pa Pulatifomu: 2.0m (kutalika) x 1.2m (m'lifupi), mphamvu yonyamula katundu yoposa 100kg (kutengera kugwedezeka kwa kuwala kumalimbikitsidwa).
2) Kutentha kwa Ntchito: 20 ~ 30°C
3) Chinyezi: 35% ~ 60% RH
4) Mphamvu Yopereka Mphamvu: 220VAC
5) Phase Current: Mtengo wa RMS wochepera 4A (220VAC);
6) Mphamvu Yokwanira: 800W

Chinthu Choyezera Ellipsometry

Mfundo Yoyesera ya Ellipsometry

Njira Yowunikira Ellipsometry

Muller Matrix Ellipsometry

Choyezera Ma Spectroscopic cha Filimu Yopyapyala

ME-L Mueller Matrix Ellipsometry

Kafukufuku wokhazikika wokhazikika wa Mueller matrix ellipsometry

Kusintha kwa ngodya ndi ukadaulo wokhazikika wokha, kuyeza mwachangu kamodzi kokha

Mawonekedwe ogwirizana a anthu ndi makina, njira yabwino yogwiritsira ntchito mapulogalamu

Laibulale ya zitsanzo za zinthu zambiri ndi ma algorithm, luso lamphamvu losanthula deta

Mafotokozedwe Aukadaulo

Nambala ya Chitsanzo	ME-L
Mapulogalamu	Kalasi Yofufuza/Yamabizinesi
Ntchito Zoyambira	Psi/Delta, R/T, Mueller Matrix, ndi masensa ena owonera
Kusanthula kwa Spectrum	380-1000nm (imathandizira kukulitsa mpaka 193-2500nm)
Nthawi Yoyezera Imodzi	≤masekondi 15
Kulondola kwa Muyeso Wobwerezabwereza	0.005nm
Kulondola Konse (Mpweya Woyezera Kudzera M'njira Yoyenera)	Magawo a Ellipsometry: 4 = 45 ± 0.05°, A = 0 ± 0.1° Muller matrix: Choyimira chopingasa m = 10.005 Chinthu chopanda diagonal m = 0 ± 0.005
Kulondola kwa Kubwerezabwereza kwa Refractive Index	0.0005
Kukula kwa Malo	Kukula kwa malo akulu: 2-4 mm Kukula kwa malo ang'onoang'ono: 200 μm/100 μm Kukula kwa malo ochepa kwambiri: 50 μm (kutengera kutalika kwa nthawi)

Chizindikiro cholondola chobwerezabwereza chimachokera pa miyeso 30 yobwerezabwereza ya chitsanzo chokhazikika cha 100nm SiO2/Si;

Magawo enieni aukadaulo a chidachi akugwirizana ndi ma module ndi zowonjezera zenizeni, ndipo deta yomwe ili patebuloyi ndi yongogwiritsidwa ntchito.

Makonzedwe Osankha

Kusankha Ma Band	VN: 380-1650nm
V: 380-1000nm	UN: 210-1650nm
UV: 245-1000nm	DN: 193-1650nm
UV+: 210-1000nm	UN+: 210-2500nm
DUV: 193-1000nm	DN+: 193-2500nm

Kusankha Ngodya

Yokhazikika: 65°
Zokha: 45-90°
Buku: 45-90° (kuwonjezeka kwa 5°)

Zosankha Zina

Zosankha za Mapu: 100*100mm/200*200mm

Gawo Lolamulira Kutentha: 190-550°C/RT-1000°C

Zambiri zaife

Yakhazikitsidwa mu 2015, MSK (Tianjin) International Trading CO., Ltd yakula mosalekeza ndipo yakhala ikupitilira.Rheinland ISO 9001 kutsimikizikaNdi malo opukusira a ku Germany a SACCKE apamwamba kwambiri, malo owunikira zida za ku Germany a ZOLLER a ma axis asanu, makina a Taiwan PALMARY ndi zida zina zapamwamba zopangira padziko lonse lapansi, tadzipereka kupangawapamwamba kwambiri, waluso komanso wothandizaChida cha CNC.

Zapadera zathu ndi kapangidwe ndi kupanga mitundu yonse ya zida zolimba zodulira carbide:Zigayo zomaliza, zobowolera, zokokera madzi, matepi ndi zida zapadera.Malingaliro athu a bizinesi ndi kupatsa makasitomala athu mayankho athunthu omwe angathandize kukonza makina, kuwonjezera zokolola, komanso kuchepetsa ndalama.Utumiki + Ubwino + Magwiridwe AbwinoGulu lathu la Uphungu limaperekansoluso la kupanga, ndi njira zosiyanasiyana zakuthupi ndi zama digito zothandizira makasitomala athu kuyenda bwino mtsogolo mwa makampani 4.0. Kuti mudziwe zambiri za gawo lililonse la kampani yathu, chondefufuzani tsamba lathu orgwiritsani ntchito gawo la Lumikizanani nafekuti tilankhule ndi gulu lathu mwachindunji.

Mbiri Yafakitale

Chifukwa Chake Sankhani Ife

FAQ

Q1: Kodi ndife ndani?

A1: Yokhazikitsidwa mu 2015, MSK (Tianjin) Cutting Technology CO.Ltd yakula mosalekeza ndipo yapambana Rheinland ISO 9001.
kutsimikizira. Ndi malo opukutira a ku Germany a SACCKE apamwamba kwambiri, malo owunikira zida za ku Germany a ZOLLER asanu ndi limodzi, makina a Taiwan PALMARY ndi zida zina zapamwamba zopangira padziko lonse lapansi, tadzipereka kupanga chida cha CNC chapamwamba, chaukadaulo komanso chogwira ntchito bwino.

Q2: Kodi mukuchita malonda ndi kampani kapena wopanga?

A2: Ndife fakitale ya zida za carbide.

Q3: Kodi mungatumize zinthu ku Forwarder yathu ku China?

A3: Inde, ngati muli ndi Forwarder ku China, tidzakondwera kumutumizira zinthu.

Q4: Ndi malamulo ati olipira omwe amavomerezedwa?

A4: Nthawi zambiri timalandira T/T.

Q5: Kodi mumalandira maoda a OEM?

A5: Inde, OEM ndi kusintha kwa zinthu zilipo, ndipo timaperekanso ntchito yosindikiza zilembo.

Q6: N’chifukwa chiyani muyenera kusankha ife?

A6:1) Kuwongolera mtengo - kugula zinthu zapamwamba pamtengo woyenera.

2) Yankho lachangu - mkati mwa maola 48, akatswiri adzakupatsani mtengo ndikuyankha nkhawa zanu.

3) Ubwino Wapamwamba - Kampaniyo nthawi zonse imatsimikizira ndi cholinga chenicheni kuti zinthu zomwe imapereka ndi zapamwamba 100%.

4) Utumiki wa pambuyo pa malonda ndi malangizo aukadaulo - Kampaniyo imapereka chithandizo pambuyo pa malonda ndi malangizo aukadaulo malinga ndi zosowa ndi zosowa za makasitomala.

Yapitayi: Chida Choyezera Mizere Yapamwamba Kwambiri SP1000 | Choyesera Mbiri ya 2D & Kuyipa Kwa Malo

Ena: Chotsatirira Chachikulu Cha Laser Chonyamula | Dongosolo Loyezera Mafakitale la 3D Lolondola Kwambiri