Ellipsometer Yakanyatsojeka yeSpectroscopic | Sisitimu Yekuyera Hukobvu Hwemafirimu Husina Kuparadza & Refractive Index
Mirairo Yekuraira
Nekuda kwehunhu hwechigadzirwa, mutengo unoratidzwa papeji ndewedhipoziti, kwete mutengo chaiwo. Ndapota taura nevatengi kuti muwane mutengo.
Maodha akaiswa zvakananga pasina kutaurwa kare haagone kutumirwa! Tinotenda nekushandira pamwe kwenyu! Kuti uwane rumwe ruzivo nezvechigadzirwa, ndapota taura nevatengi kuti mugamuchire mabhurocha echigadzirwa.
Zviyero Zvikuru
Ukobvu hwefirimu (rimwe chete kusvika kune akawanda-layer)
Refractive Index (n) & Extinction Coefficient (k)
Mukana weOptical Band (Eg)
Kuoma Kwepamusoro
Zvinhu Zvikuru zveUnyanzvi
Wide Spectral Range: Kufukidzwa kweUV kusvika kuNIR kwekuongorora zvinhu zvakasiyana-siyana
Kunzwa Kwakanyanya: Kukwanisa kuyera mafirimu akatetepa zvakanyanya kusvika padanho repasi penanometer
Hazvibatanidzi uye Hazviparadzi: Zvakanakira masampuli anonzwa muR&D nenzvimbo dzekugadzira
Software Yepamusoro Yekutevedzera: Inotsigira ongororo yakaoma yemastack akawanda ane ma "multi-layer" nema "workflows" ari nyore kushandisa
Mashandisirwo
Sisitimu iyi inoshandiswa zvakanyanya mukugadzira ma semiconductor, optical coating, flat panel displays, photovoltaic (solar cell), kutsvakurudza kwesainzi yezvinhu, uye biosensing.
Sei Uchifanira Kusarudza Mhinduro Yedu?
Semugadziri ane hunyanzvi ane hunyanzvi hweR&D, tinopa mitengo yakananga kubva kufekitori, magadzirirwo anogadziriswa, uye rutsigiro rwehunyanzvi rwakatsaurirwa. Kunyangwe muchida sisitimu yekuongorora yerabhoritari kana mhinduro iri mumutsara yekutarisa kugadzirwa, tinogona kugadzirisa chishandiso ichi kuti chienderane nezvinodiwa zvenyu zvekuyera.
Kumbira Mutengo
Tibatei nhasi kuti mukurukure nezvechikumbiro chenyu kana kukumbira mutengo. Chikwata chedu chinopa mazano ehunyanzvi emahara kuti chikubatsirei kusarudza mhinduro yakakodzera yekuyera firimu rakatetepa.
MaParamende Makuru Ehunyanzvi
1. Kukwanisa Kuyera: Zvinhu zveMueller matrix zve16th order, polarization spectrum Psi/Delta, refractive index, ukobvu, birefringence, uye dielectric constant, nezvimwewo.
2. Rudzi rweSpectral: 210nm-1690nm
3. Kureba kweWavelength: ≤0.8nm@210-1000nm, ≤3.5nm@1000-1690nm
4. Nguva Yekuyera Yemapoinzi Mamwechete: ≤10s
5. Saizi yeMicro-spot: ≤200μm
6. Tekinoroji yeModulation: PCSCA dual rotary compensator system modulation
7. Danho remuenzaniso otomatiki: Z-axis otomatiki inotarisa, kufamba kwakanyanya 18mm, nhanho diki 1µm
8. Kururama kwekudzokororwa kweukobvu hwefirimu: ≤0.005nm (100nm SiO2/Si, zviyero zvakadzokororwa makumi matatu, zvakaverengerwa se1σ)
9. Kururama kwekudzokorora kweindekisi yeRefractive index: ≤0.0002 (100nm SiO2/Si, zviyero makumi matatu zvakadzokororwa, zvakaverengerwa se1σ)
10. Kunyatsokodzera kweukobvu hwefirimu: ≤0.5% (100nm SiO2/Si, mushumo wemetrology webato rechitatu wapihwa)
11. Basa reMepu: Rinoshandisa danho rekuskena otomatiki rine mhando ye x/y, rinotsigira kuyera otomatiki uye kuyera kwe 2/4/6/8-inch substrates, kurongeka kwekudzokororwa ≤6μm, kugadzira kamwe chete kwemamepu ekugovera 2D/3D thickness film.
12. Kutarisa nekutarisa neLaser: Kuisa otomatiki nzvimbo yekutarisa neLaser reflection optical path, kutarisa kufamba ≤3mm
13. Muenzaniso wemusiyano: Inoverenga otomatiki data remusiyano wepsi-diff uye delta-diff
14. Software yekuongorora: Ine nzira dzekuyera dzakasiyana kanenge kashanu, database ye n/k yakavakirwa mukati yezvinhu zvinodarika zana zve optical, uye inotsigira kugadzira madhatabhesi akagadzirwa; ine kugona kwekuongorora nekuongorora mamodheru e single-layer, multi-layer (kusvika ku30 layers), uye composite alternating thin films, kusanganisira cauchy, Sellmeier, Tauc-Lorentz, Bspline, uye Oscillator models, uye inotsigira offline software licensing.
Magadzirirwo ehunyanzvi
I. Nhanganyaya yeMidziyo
Iyo ME-Mapping Spectroellipsometry ine tekinoroji yekuchinja kwe dual-rotation compensator pamwe chete ne high-precision data analysis algorithms. Inogona kuwana zvese zvinhu gumi nematanhatu zveMueller matrix yakazara uye polarization spectrum mune imwe chete measurement, zvichiita kuti kuyerwa kwemuenzaniso kuwedzere nekukurumidza uye kusingaparadze. Chishandiso ichi chine dhizaini yakagadzikana ye optical uye chinoshandisa semiconductor-cooled detector, ichiwana masaini echiedza mukati memasekonzi. Chinopa kukurumidza kwekuyera nekukurumidza uye kunyatsojeka, chichitsigira kuyerwa kwakanyatsojeka kwema parameter akadai se thin index, refractive index, extinction coefficient, uye optical dielectric constant yezvinhu zvakasiyana-siyana zvefirimu diki. Uyezve, inogona kugadziriswa ne "wafer repeatable positioning stages" dzakasiyana-siyana dze multi-point mapping scanning measurements dzakasiyana-siyana hombe-saizi.
II. Chiyero Chekushandisa
MaEllipometrist anonyanya kushandiswa muma semiconductors, flat panel displays, solar photovoltaics, optical thin films, optical communications, uye nanomaterials.
III. Zvinodiwa Zvese Zvehunyanzvi
1. Magadzirirwo ehunyanzvi:
1.1 Zviyero zveKuyera: Zvinhu zveMueller matrix zve16th-order, Psi/Delta, refractive index, ukobvu, birefringence, uye dielectric constant, nezvimwewo.
1.2 Rudzi rweSpectral: 210nm-1690nm;
1.3 Nguva Yekuyera Yemapoinzi Mashoma: ≤10s;
1.4 Saizi yeMicrospot: ≤200μm;
1.5 Tekinoroji yeModulation: PC1SCA modulation yekudzoserwa kwemari kaviri;
1.6 Danho remuenzaniso rinoita otomatiki: Rinotsigira otomatiki z-axis focusing, kufamba kwakanyanya 18mm, nhanho diki 1μm;
1.7 Kudzokorora Kwekukora Kwemafirimu Kururama: ≤0.005nm (100nm SiO2/Si, kuyerwa kwakadzokororwa makumi matatu, kwakaverengerwa 1σ);
1.8 Kururama kweRefractive Index Repeatability: ≤0.0002 (100nm SiO2/Si, zviyero makumi matatu zvakadzokororwa, zvakaverengerwa 1σ);
1.9 Kururama kweKukora kweFirimu: ≤0.5% (100nm SiO2/Si, mushumo wemetrology webato rechitatu wapihwa); μm
1.10 Basa reMepu: Rinoshandisa danho rekuskena otomatiki remhando ye x/y rakanyatsojeka, richitsigira kuyera otomatiki uye kuyera kwe 2/4/6/8-inch substrates, rine kururama kunodzokororwa ≤6μm, uye kugadzira kamwe chete kwemamepu ekugovera 2D/3D thickness film;
1.11 Kutsvaga uye Kutarisisa neLaser: Kuisa urefu hwefocal otomatiki uchishandisa nzira yekutarisa nelaser, nekufamba kwekutsvaga nefocus ≤3mm;
1.12 Kuyera Ukobvu hweFirimu Range: 1nm-10μm;
1.13 Muenzaniso weMusiyano: Inoverenga otomatiki data remusiyano wepsi-diff uye delta-diff;
1.14 Software Yekuongorora:
* Kugona Kuyera Spectroscopic: Zvinhu gumi nematanhatu zveMueller matrix yakazara, Psi/Delta polarization spectroscopy, N/C/S, depolarization, nezvimwewo;
* Kugona Kuongorora Data: Kukwanisa kuongorora ukobvu uye ma optical constants (n, k) e single-layer uye multi-layer (kusvika 20 layers) isotropic uye anisotropic thin film materials;
* Inotsigira mamodheru e optical constants, refractive index gradient distribution, equivalent media, roughness, nezvimwewo, ema multi-component thin films uye bulk materials;
* Inotsigira mamodheru emagetsi anowanzoonekwa uye mamodheru emagetsi anowanzoonekwa (Cauchy model, Lorentz model, Gaussian model, Drude, Sellmeier, nezvimwewo), uye inotsigira graphical multi-oscillator hybrid model fitting;
* Inotsigira kuburitsa mifananidzo ye2D/3D topographic, kuona data rekare, uye kutumira nekugadzira data nemishumo inoenderana naro;
* Mafomati Ekubuda Kwedata: TXT, CSV, SNAP snapshot, raw spectrum, DAT, nezvimwewo;
* Inotsigira kuyerwa kwekunonoka kwechikamu, inokwanisa kuyedza kunonoka kwechikamu, kona ye azimuth, kona yekutenderera ye optical, chiyero che amplitude, kurongeka, nezvimwewo;
* Iine 1D/2D periodic grating structure analysis uye modeling functions.
2. Rondedzero Yekugadzirisa:
1) Seti imwe yechikamu chikuru cheellipsometer;
2) Seti imwe neimwe yeruoko rweellipsometry neruoko rweanalyzer;
3) Seti imwe yedanho remuenzaniso otomatiki;
4) Seti imwe chete yesoftware yekuongorora;
5) Seti imwe yemasiraidhi akajairwa;
6) Kombiyuta imwe chete;
7) Seti imwe chete yezvishandiso zvekugadzirisa matambudziko;
8) Seti imwe chete yekubatanidza micro-spot;
9) Pombi imwe chete yekubvisa mvura inodziya;
10) Danho rimwe chete rekuongorora mepu.
3. Kombiyuta yekuyera nekudzora
Inoshandisa komputa yebhizinesi ine sisitimu inoshanda yeWindows 10; CPU: i7 processor; Memory: 15GB; Hard Disk: 1TB; LCD monitor: 24-inch; inosanganisira mbeva nekhibhodi.
4. Zvinodiwa pakuchengetedza nharaunda nemagetsi:
1) Zvinodiwa papuratifomu: 2.0m (kureba) x 1.2m (upamhi), mutoro unorema kupfuura 100kg (kupatsanurwa kwe vibration ye optical kunokurudzirwa).
2) Kushanda kweTembiricha: 20~30°C
3) Hunyoro: 35% ~ 60% RH
4) Simba reKupa Simba: 220VAC
5) Phase Current: RMS kukosha kwayo kuri pasi pe4A (220VAC);
6) Simba Guru: 800W
Chinhu Chinoyerwa cheEllipsometry
Nheyo yekuyera ellipsometry
Maitiro Ekuongorora Ellipsometry
Muller Matrix Ellipsometry
ME-L Mueller Matrix Ellipsometry
Ongororo yegiredhi rekutsvaga rinoita otomatiki zvizere rine matrix ellipsometry yepamusoro-soro
Kugadzirisa kona zvizere otomatiki uye tekinoroji yekutarisa, kuyera nekukurumidza nekudzvanya kamwe chete
Inotungamirirwa inodyidzana nevanhu-muchina interface, ruzivo rwekushanda kwesoftware rwuri nyore
Dhatabhesi rine zvinhu zvakawanda uye raibhurari yemuenzaniso wealgorithm, kugona kwakasimba kwekuongorora data
Magadzirirwo ehunyanzvi
| Nhamba yeModhero | ME-L |
| Mashandisirwo | Kutsvaga/Giredhi reBhizinesi |
| Mabasa Ekutanga | Psi/Delta, R/T, Mueller Matrix, nedzimwe sensor dzemaziso |
| Kuongorora kweSpectrum | 380-1000nm (inotsigira kuwedzera kusvika 193-2500nm) |
| Nguva Yekuyera Imwe Chete | ≤15s |
| Kuyera Kudzokorora Kururama | 0.005nm |
| Kunyatsorurama (Mhepo Inoyera Kupfuura Nekupfuura) | Zviyero zveEllipsometry: 4 = 45 ± 0.05°, A = 0 ± 0.1° Muller matrix: Chinhu chedhayagonal m = 10.005 Chinhu chiri kunze kwedhayagoni m = 0 ± 0.005 |
| Kururama kweRefractive Index Repeatability | 0.0005 |
| Saizi yenzvimbo | Saizi yenzvimbo yakakura: 2-4 mm Saizi diki yenzvimbo: 200 μm/100 μm Saizi yenzvimbo diki-diki: 50 μm (zvichienderana nehurefu hwewavelength) |
Kururama kwekudzokorora kwakavakirwa pazviyero makumi matatu zvinodzokororwa zvemuenzaniso we100nm SiO2/Si;
Zvimiro zvehunyanzvi zvechishandiso zvine chekuita nemamodules chaiwo anoshanda uye zvishongedzo, uye data riri mutafura nderekutarisa chete.
Zvigadziriso zveSarudzo
| Kusarudzwa kweBhendi | VN: 380-1650nm |
| V: 380-1000nm | UN: 210-1650nm |
| UV: 245-1000nm | Kureba: 193-1650nm |
| UV+: 210-1000nm | UN+: 210-2500nm |
| DUV: 193-1000nm | DN+: 193-2500nm |
Sarudzo yeAngle
Yakagadziriswa: 65°
Otomatiki: 45-90°
Nemaoko: 45-90° (5° increments)
Dzimwe Sarudzo
Sarudzo dzeMepu: 100*100mm/200*200mm
Danho reKudzora Tembiricha: 190-550°C/RT-1000°C
Nezvedu
Mbiri Yefekitori
Sei Uchifanira Kusarudza Isu
Mibvunzo Inowanzo bvunzwa
Mubvunzo 1: Ndisu vanaani?
A1: Yakavambwa muna 2015, MSK (Tianjin) Cutting Technology CO.Ltd yakaramba ichikura uye yakapa Rheinland ISO 9001
kusimbiswa. Tiine nzvimbo dzekugayira dzeGerman SACCKE dzemhando yepamusoro, nzvimbo yekuongorora maturusi eGerman ZOLLER emhando yepamusoro, muchina weTaiwan PALMARY nemimwe michina yekugadzira yepamusoro-soro yepasi rose, takazvipira kugadzira chishandiso cheCNC chemhando yepamusoro, chehunyanzvi uye chinoshanda zvakanaka.
Mubvunzo wechipiri: Uri kambani yekutengesa kana mugadziri here?
A2: Isu tiri fekitari yezvishandiso zve carbide.
Mubvunzo wechitatu: Munogona kutumira zvigadzirwa kuForwarder yedu kuChina here?
A3: Ehe, kana muine Forwarder kuChina, tichafara kumutumira zvigadzirwa.
Mubvunzo wechina: Ndeapi mamiriro ekubhadhara anogamuchirwa?
A4: Kazhinji tinogamuchira T/T.
Q5: Munogamuchira maodha eOEM here?
A5: Ehe, OEM uye kugadzirisa zviripo, uye tinopawo basa rekudhinda label.
Mubvunzo wechitanhatu: Sei uchifanira kusarudza isu?
A6:1) Kudzora mutengo - kutenga zvigadzirwa zvemhando yepamusoro nemutengo wakakodzera.
2) Mhinduro nekukurumidza - mukati memaawa makumi mana nemasere, vashandi vane hunyanzvi vachakupa mutengo uye vachagadzirisa zvinokunetsa.
3) Hunhu hwepamusoro - Kambani inogara ichiratidza nechinangwa chechokwadi kuti zvigadzirwa zvainopa ndezvemhando yepamusoro 100%.
4) Basa rekutengesa mushure mekutengesa uye nhungamiro yehunyanzvi - Kambani inopa basa rekutengesa mushure mekutengesa uye nhungamiro yehunyanzvi zvichienderana nezvinodiwa nevatengi.
