Ellipsometer ea Spectroscopic e Hloahloa e sa Senyeheng | Sistimi ea Tekanyo ea Filimi e Nyenyane e sa Senyeheng le Refractive Index
Litaelo tsa ho odara
Ka lebaka la mofuta o ikhethang oa sehlahisoa, theko e bontšitsoeng leqepheng ke theko ea depositi, eseng theko ea sebele. Ka kopo ikopanye le tšebeletso ea bareki bakeng sa khotheishene.
Liodara tse entsoeng ka kotloloho ntle le ho ikopanya le rona pele li ke ke tsa romelloa! Kea leboha tšebelisano-'moho ea lona! Bakeng sa tlhaiso-leseling e batsi ea sehlahisoa, ka kopo ikopanye le tšebeletso ea bareki ho fumana libukana tsa sehlahisoa.
Litekanyo tsa Bohlokoa
Botenya ba Filimi (e le 'ngoe ho isa ho e mengata)
Index ea Refractive (n) le Coefficient ea ho Fela (k)
Lekhalo la Lebanta la Optical (Mohlala)
Bokakang ba Bokaholimo
Lintlha-khōlō tsa Tekheniki
Mefuta e Meholo ea Li-spectral: Tšireletso ea UV ho tloha ho NIR bakeng sa tlhahlobo ea thepa e feto-fetohang
Ho ba le kutlo e phahameng: E khona ho lekanya lifilimi tse tšesaane haholo ho fihlela tekanyong e ka tlase ho nanometer
Ha e Kopane le ho Senya: E loketse disampole tse bonolo ho tsa R&D le tikoloho ya tlhahiso
Software e Tsoetseng Pele ea ho Etsa Mehlala: E tšehetsa tlhahlobo e rarahaneng ea li-stack tsa mekhahlelo e mengata ka mesebetsi e bonolo ho e sebelisa
Likopo
Sistimi ena e amohelwa haholo tlhahisong ea semiconductor, ho penta ka mahlo, lipontšo tsa phanele e bataletseng, nts'etsopele ea photovoltaic (sele ea letsatsi), lipatlisiso tsa mahlale a thepa, le ho lemoha lintho tse phelang.
Hobaneng u Khetha Tharollo ea Rona
Jwalo ka moetsi wa profeshenale ya nang le bokgoni bo matla ba R&D, re fana ka ditheko tse tobileng fekthering, ditlhophiso tse ka fetolwang, le tshehetso e ikgethileng ya botekgeniki. Hore na o hloka sistimi ya benchtop bakeng sa tlhahlobo ya laboratori kapa tharollo e hokahaneng bakeng sa tlhokomelo ya tlhahiso, re ka etsa sesebediswa hore se lumellane le ditlhoko tsa hao tse ikgethang tsa tekanyo.
Kopa Khoteshene
Ikopanye le rona kajeno ho buisana ka kopo ea hau kapa ho kopa khotheishene. Sehlopha sa rona se fana ka likeletso tsa tekheniki tsa mahala ho u thusa ho khetha tharollo e nepahetseng ea ho lekanya filimi e tšesaane.
Li-parameter tse ka sehloohong tsa tekheniki
1. Bokgoni ba ho Lekanya: Dikarolo tsa matrix tsa Mueller tsa odara ya bo-16, polarization spectrum Psi/Delta, refractive index, botenya, birefringence, le dielectric constant, jj.
2. Mefuta ea Spectral: 210nm-1690nm
3. Sebaka sa Bolelele ba Maqhubu: ≤0.8nm@210-1000nm, ≤3.5nm@1000-1690nm
4. Nako ea Tekanyo ea Ntlha e le 'Ngoe: ≤10s
5. Boholo ba letheba le lenyenyane: ≤200μm
6. Theknoloji ea ho Fetola Molumo: PCSCA dual rotary compensator system modification
7. Mokhahlelo oa Sampole o Iketsang: Ho tsepamisa maikutlo ka boiketsetso ho Z-axis, maeto a maholo a 18mm, mohato o fokolang oa 1µm
8. Ho nepahala ha ho pheta-pheta ha botenya ba filimi: ≤0.005nm (100nm SiO2/Si, litekanyo tse 30 tse phetoang, tse baloang e le 1σ)
9. Ho nepahala ha ho pheta-pheta ha index ea refractive index: ≤0.0002 (100nm SiO2/Si, litekanyo tse 30 tse phetoang, tse baloang e le 1σ)
10. Ho nepahala ha botenya ba filimi ka botlalo: ≤0.5% (100nm SiO2/Si, tlaleho ea metrology ea motho oa boraro e fanoe)
11. Mosebetsi oa ho etsa 'mapa: E sebelisa mokhoa oa ho skena o iketsang oa mofuta oa x/y o nepahetseng haholo, e tšehetsa ho beha le ho lekanya ka bohona libaka tse ka tlase tsa lisenthimithara tse 2/4/6/8, ho nepahala ha ho pheta-pheta ≤6μm, ho hlahisa limmapa tsa kabo ea botenya ba filimi ea 2D/3D ka ho tobetsa hanngoe.
12. Ho arola le ho tsepamisa maikutlo ka laser: Ho beha bolelele ba focal ka boiketsetso ka tsela ea optical reflection ea laser, ho tsepamisa maikutlo leetong ≤3mm
13. Mohlala oa phapang: E bala ka bohona data ea phapang ea psi-diff le delta-diff
14. Software ea tlhahlobo: E na le bonyane mekhoa e 5 e fapaneng ea ho lekanya, database ea n/k e hahiloeng kahare bakeng sa thepa ea optical e fetang 100, 'me e tšehetsa ho theha li-database tse ikhethileng; e na le bokhoni ba ho hlahloba le ho etsa mohlala bakeng sa lera le le leng, le nang le lera le le leng (ho fihlela ho lera le 30), le lifilimi tse tšesaane tse kopaneng, ho kenyeletsoa le mehlala ea cauchy, Sellmeier, Tauc-Lorentz, Bspline, le Oscillator, 'me e tšehetsa laesense ea software e sa sebelisoeng inthaneteng.
Litlhaloso tsa Tekheniki
I. Selelekela sa Lisebelisoa
ME-Mapping Spectroellipsometry e na le theknoloji ea phetoho ea compensator ea dual-rotation compensator e kopantsoeng le li-algorithms tsa tlhahlobo ea data tse nepahetseng haholo. E ka fumana likarolo tsohle tse 16 tsa matrix e felletseng ea Mueller le spectrum ea polarization ka tekanyo e le 'ngoe, e nolofalletsang tekanyo e potlakileng le e sa senyeheng ea sampole. Sesebelisoa sena se ithorisa ka moralo o tsitsitseng oa tsela ea optical 'me se sebelisa detector e pholileng ea semiconductor, e fumanang matšoao a matla a khanya ka metsotsoana. E fana ka lebelo le potlakileng la tekanyo le ho nepahala ho hoholo, e tšehetsa tekanyo e nepahetseng ea liparamente tse kang botenya, index ea refractive, coefficient ea ho fela, le constant ea dielectric ea optical bakeng sa thepa e fapaneng ea filimi e tšesaane. Ho feta moo, e ka fetoloa ka "mehato ea ho beha sebaka e ka phetoang ea wafer" ea boholo bo fapaneng bakeng sa litekanyo tsa ho hlahloba 'mapa oa lintlha tse ngata tsa lisampole tse fapaneng tse kholo.
II. Sebaka sa Kopo
Li-ellipsometrists li sebelisoa haholo-holo ho li-semiconductor, lipontšo tsa liphanele tse bataletseng, li-photovoltaics tsa letsatsi, lifilimi tse tšesaane tsa optical, puisano ea optical le li-nanomaterials.
III. Litlhoko tsa Tekheniki ka Kakaretso
1. Litlhaloso tsa Tekheniki:
1.1 Diparamithara tsa Tekanyo: Dielemente tsa Mueller tsa odara ya bo-16, Psi/Delta, refractive index, botenya, birefringence, le dielectric constant, jj.
1.2 Sebaka sa Spectral: 210nm-1690nm;
1.3 Nako ea Tekanyo ea ntlha e le 'ngoe: ≤10s;
1.4 Boholo ba Microspot: ≤200μm;
1.5 Theknoloji ea ho Fetola Molumo: Ho Fetola Molumo oa Puseletso ea PC1SCA ea ho Potoloha habeli;
1.6 Mokhahlelo oa Sampole o Iketsang: E tšehetsa ho tsepamisa mohopolo oa z-axis ka boiketsetso, leeto le phahameng ka ho fetisisa la 18mm, mohato o fokolang oa 1μm;
1.7 Botenya ba Filimi Ho nepahala ha ho Pheta-pheta: ≤0.005nm (100nm SiO2/Si, litekanyo tse 30 tse phetoang, tse baloang ka 1σ);
1.8 Ho nepahala ha ho pheta-pheta ha Index e Refractive Index: ≤0.0002 (100nm SiO2/Si, litekanyo tse 30 tse phetoang, tse baloang ka 1σ);
1.9 Ho nepahala ha Botenya ba Filimi ka ho Feletseng: ≤0.5% (100nm SiO2/Si, tlaleho ea metrology ea mokha oa boraro e fanoe); μm
1.10 Mosebetsi oa ho Etsa 'Mapa: E sebelisa sethala sa ho skena se iketsang sa mofuta oa x/y se nepahetseng haholo, se tšehetsang ho beha le ho lekanya ka boiketsetso li-substrate tsa 2/4/6/8-inch, ka ho nepahala ho pheta-phetoang ≤6μm, le tlhahiso ea hang-hang ea limmapa tsa kabo ea botenya ba filimi ea 2D/3D;
1.11 Ho Fumana le ho Tsepamisa Maikutlo ka Laser: Ho beha bolelele ba focal ka bohona ho sebedisa tsela ya optical ya ho bontsha lesedi ka laser, ka leeto la ho fumana tsepamiso ≤3mm;
1.12 Tekanyo ea Botenya ba Filimi Sebaka: 1nm-10μm;
1.13 Mohlala oa Phapang: E bala ka boiketsetso data ea phapang ea psi-diff le delta-diff;
1.14 Software ea Tlhahlobo:
* Bokgoni ba ho Lekanya Spectroscopic: Dikarolo tse 16 tsa matrix e felletseng ya Mueller, spectroscopy ya polarization ya Psi/Delta, N/C/S, depolarization, jj.;
* Bokgoni ba Tlhahlobo ya Lintlha: E kgona ho sekaseka botenya le di-constant tsa optical (n, k) tsa thepa ya filimi e tshesane ya isotropic le anisotropic ya lera le le leng le e nang le lera le lengata (ho fihlela ho lera le 20);
* E tšehetsa mehlala ea li-constant tsa optical, kabo ea gradient ea refractive index, media e lekanang, roughness, jj., ea lifilimi tse tšesaane tsa likarolo tse ngata le thepa e kholo;
* E tšehetsa mehlala e tloaelehileng ea optical constant le mehlala e tloaelehileng ea oscillator (mohlala oa Cauchy, mohlala oa Lorentz, mohlala oa Gaussian, Drude, Sellmeier, jj.), 'me e tšehetsa ho lokisoa ha mohlala oa graphical multi-oscillator hybrid;
* E tšehetsa ho ntša litšoantšo tsa topographic tsa 2D/3D, ho shebella lintlha tsa nalane, le ho romela le ho hlophisa lintlha le litlaleho tse tsamaellanang le tsona;
* Difomete tsa Tlhahiso ya Data: TXT, CSV, snapshot ya SNAP, spectrum e tala, DAT, jj.;
* E tšehetsa tekanyo ea tieho ea mohato, e khonang ho leka tieho ea mohato, angle ea azimuth, angle ea potoloho ea optical, karolelano ea amplitude, tatellano, jj.;
* E na le tlhahlobo ea sebopeho sa grating ea 1D/2D le mesebetsi ea ho etsa mohlala.
2. Lethathamo la Litlhophiso:
1) Sete e le 'ngoe ea yuniti e kholo ea ellipsometer;
2) Sete e le 'ngoe ea letsoho la ellipsometry le letsoho la analyzer;
3) Sete e le 'ngoe ea mohato oa sampole o iketsang;
4) Sete e le 'ngoe ea software ea tlhahlobo;
5) Sete e le 'ngoe ea li-slide tse tloaelehileng;
6) Khomphutha e le 'ngoe;
7) Sete e le 'ngoe ea lisebelisoa tsa ho lokisa liphoso;
8) Sete e le 'ngoe ea kopano ea matheba a manyane;
9) Pompo e le 'ngoe ea ho monya metsi ka vacuum;
10) Mokhahlelo o le mong oa ho hlahloba 'mapa.
3. Khomphutha ea Tekanyo le Taolo
E sebelisa PC ea indasteri ea khoebo e nang le sistimi e sebetsang ea Windows 10; CPU: processor ea i7; Memori: 15GB; Hard Disk: 1TB; LCD monitor: 24-inch; e kenyelletsa mouse le keyboard.
4. Litlhoko tsa Tikoloho le Matla:
1) Litlhoko tsa Sethala: 2.0m (bolelele) x 1.2m (bophara), boima ba mojaro bo fetang 100kg (ho kgothaletswa ho arohanya ho thothomela ha optical).
2) Mefuta ea Mocheso o Tshebetso: 20~30°C
3) Mongobo o lekanyelitsoeng: 35% ~ 60% RH
4) Motlakase oa Phepelo ea Matla: 220VAC
5) Mokhahlelo oa Hona joale: Boleng ba RMS bo ka tlase ho 4A (220VAC);
6) Matla a Phahameng: 800W
Ntho ea Tekanyo ea Ellipsometry
Molao-motheo oa Tekanyo ea Ellipsometry
Mokhoa oa Tlhahlobo ea Ellipsometry
Ellipsometry ea Muller Matrix
ME-L Mueller Matrix Ellipsometry
Sebopeho sa lipatlisiso sa Mueller matrix ellipsometry se iketsang ka botlalo ka nepo e phahameng
Ho lokisa likhutlo ka boiketsetso le theknoloji ea ho tsepamisa maikutlo ka boiketsetso ka botlalo, tekanyo e potlakileng ea ho tobetsa hanngoe
Sebopeho se tataisoang se sebelisanang sa motho le mochini, boiphihlelo bo bonolo ba ts'ebetso ea software
Laeborari e ruileng ea lisebelisoa le laeborari ea mohlala ea algorithm, bokhoni bo matla ba tlhahlobo ea data
Litlhaloso tsa Tekheniki
| Nomoro ea Mohlala | ME-L |
| Likopo | Kereiti ea Lipatlisiso/Khoebo |
| Mesebetsi ea Motheo | Psi/Delta, R/T, Mueller Matrix, le di-sensor tse ding tsa optical |
| Tlhahlobo ea Spectrum | 380-1000nm (e tšehetsa katoloso ho fihlela ho 193-2500nm) |
| Nako ea Tekanyo e le 'Ngoe | ≤15s |
| Ho nepahala ha Tekanyo ea ho Pheta-pheta | 0.005nm |
| Ho Nepahala ka ho Feletseng (Moea o Lekanyang ka ho Fetela) | Litekanyetso tsa Ellipsometry: 4 = 45 ± 0.05°, A = 0 ± 0.1° Matrix ea Muller: Karolo e otlolohileng m = 10.005 Karolo e sa shebaneng le daegonale m = 0 ± 0.005 |
| Ho nepahala ha ho pheta-pheta ha Index ea Refractive | 0.0005 |
| Boholo ba Sebaka | Boholo ba sebaka se seholo: 2-4 mm Boholo ba sebaka se senyenyane: 200 μm/100 μm Boholo ba sebaka se senyenyane haholo: 50 μm (ho latela bolelele ba leqhubu) |
Tekanyetso ea ho nepahala ha ho pheta-pheta e thehiloe ho litekanyo tse 30 tse pheta-phetoang tsa sampole e tloaelehileng ea 100nm SiO2/Si;
Diparamente tse ikgethang tsa botekgeniki tsa sesebediswa di amana le dimmojule le disebediswa tsa sebele tse sebetsang, mme data e tafoleng ke ya ditshupiso feela.
Litlhophiso tse Ikhethelang
| Khetho ea Sehlopha | VN: 380-1650nm |
| V: 380-1000nm | Machaba a Kopaneng: 210-1650nm |
| UV: 245-1000nm | DN: 193-1650nm |
| UV+: 210-1000nm | UN+: 210-2500nm |
| DUV: 193-1000nm | DN+: 193-2500nm |
Khetho ea Angle
E tsitsitseng: 65°
Othomathiki: 45-90°
Ka letsoho: 45-90° (li-increments tsa 5°)
Likhetho tse ling
Likhetho tsa 'Mapa: 100*100mm/200*200mm
Mokhahlelo oa Taolo ea Mocheso: 190-550°C/RT-1000°C
Mabapi le rona
Profaele ea Feme
Hobaneng re Khetha
LBH
P1: Re bo-mang?
A1: E thehiloe ka 2015, MSK (Tianjin) Cutting Technology CO.Ltd e holile ka ho tsoelang pele mme e fetile Rheinland ISO 9001
netefatso. Ka litsi tsa ho sila tsa Jeremane tsa SACCKE tse maemong a holimo tse hlano, setsi sa tlhahlobo ea lisebelisoa tsa Jeremane tsa ZOLLER tse maemong a tšeletseng, mochini oa Taiwan PALMARY le lisebelisoa tse ling tse tsoetseng pele tsa tlhahiso tsa machabeng, re ikemiselitse ho hlahisa sesebelisoa sa CNC sa maemo a holimo, sa profeshenale le se sebetsang hantle.
P2: Na u khoebo ea k'hamphani kapa moetsi？
A2: Re fektheri ea lisebelisoa tsa carbide.
P3: Na o ka romela dihlahiswa ho Forwarder ya rona Chaena?
A3: E, haeba o na le Forwarder Chaena, re tla thabela ho mo romella lihlahisoa.
P4: Ke lipehelo life tsa tefo tse amohelehang?
A4: Ka tlwaelo re amohela T/T.
P5: Na o amohela ditaelo tsa OEM?
A5: E, OEM le ho iketsetsa tsona lia fumaneha, 'me re boetse re fana ka tšebeletso ea ho hatisa lileibole.
P6: Ke hobane'ng ha u lokela ho re khetha?
A6:1) Taolo ea litšenyehelo - ho reka lihlahisoa tsa boleng bo holimo ka theko e loketseng.
2) Karabelo e potlakileng - nakong ea lihora tse 48, basebetsi ba litsebi ba tla u fa khotheishene le ho rarolla mathata a hau.
3) Boleng bo holimo - Khamphani e lula e paka ka sepheo se tiileng hore lihlahisoa tseo e fanang ka tsona ke tsa boleng bo holimo ka 100%.
4) Tšebeletso ea kamora thekiso le tataiso ea botekgeniki - Khamphani e fana ka tšebeletso ea kamora thekiso le tataiso ea botekgeniki ho latela litlhoko le litlhoko tsa bareki.
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