MSK CNC TOOLS today announced the launch of its SR/RT Series Reflective Film Thickness Gauge, a high-precision optical instrument designed for non-contact, non-destructive thickness measurement of nano to micron thin films. The new series addresses the growing demand for fast, accurate, and repeatable film thickness testing in semiconductor, optics, display, and photovoltaic manufacturing.
Breakthrough Optical Performance
Based on the principle of reflectance spectrometry and interference of reflected light from film surfaces and interfaces, the SR/RT Series enables rapid characterization of single-layer to multi-layer thin films. Key models include the SR-M (380–900 nm, 50 nm–40 μm range), SR-C (extendable spectrum up to 1650 nm, 15 nm–70 μm range), SR-Mapping for thickness distribution mapping, and RT-V for reflection/transmission measurement.
The system achieves a repeatability of 0.02 nm (tested on 100nm SiO₂ on silicon wafer, 30 measurements) and measurement accuracy of 0.4% or 2 nm (whichever larger). Measurement time per point ranges from 0.5 to 3 seconds, allowing high-throughput inline quality control.
True Non-Contact, Non-Destructive Testing
Unlike mechanical stylus or ultrasonic gauges, the SR/RT Series uses perpendicular incidence optics and a small spot size (from 4 μm up to 0.5–1.5 mm) to measure delicate films without any physical contact. This preserves sample integrity, making it ideal for fragile semiconductor wafers, optical coatings, OLED/LCD displays, and flexible electronic films.
Wide Application Coverage
The new film thickness gauge is ready for diverse industries:
- Semiconductor – Wafer film thickness monitoring, dielectric and passivation layers
- Optical coatings – Anti-reflective (AR), high-reflective (HR) coatings, filters
- Display manufacturing – OLED, LCD, and flexible display thin films
- Photovoltaics – Solar cell anti-reflection coating thickness testing
- Glass & hard coatings – Architectural and automotive glass films
- Biomedical & flexible electronics – Thin polymer films, substrates
Customizable and Production-Ready
The SR/RT Series supports flexible configuration – from portable R&D units to fully integrated inline systems. The analytical spectrum can be extended to UV (200 nm) or NIR (1650 nm) per customer requirements. Advanced core algorithms handle films from ultra-thin (15 nm) to thick (70 μm) layers with multi-layer resolution capability.
Customer Benefits
- Faster time-to-market – Real-time, high-speed measurement reduces QC bottlenecks
- Lower cost of ownership – Non-destructive method eliminates sample waste
- Improved yield – Accurate thickness control ensures coating consistency
- Easy integration – Compact design with perpendicular incidence simplifies setup
Availability and Support
The SR/RT Series is available for global shipment with full technical documentation, installation guidance, and after-sales support. Customized solutions are available upon request.
For more information, please visit Thin film thickness gauge or contact molly@mskcnctools.com.
About MSK CNC TOOLS
MSK (Tianjin) International Trading CO.,Ltd was established in 2015, and the company has continued to grow and develop during this period. The company passed the Rheinland ISO 9001 certification in 2016. It has international advanced manufacturing equipment such as the German SACCKE high-end five-axis grinding center, the German ZOLLER six-axis tool testing center, and the Taiwan PALMARY machine tool. It is committed to producing high-end, professional and efficient CNC tools.
Post time: Jun-04-2026
