SR/RT Series Reflective Film Thickness Gauge – Non-Contact Optical Thickness Tester for Nano to Micron Thin Films
Product Overview
Our SR/RT Series reflective film thickness gauge is a high-precision, non-contact optical measurement system designed for fast and non-destructive thickness testing of thin films. Based on the principle of reflectance spectrometry and interference of reflected light from film surfaces and interfaces, this instrument accurately characterizes single-layer to multi-layer films with nanometer-level repeatability.
Whether you are inspecting semiconductor wafers, optical coatings, OLED displays, solar cell anti-reflection films, or flexible electronics, our gauge delivers reliable, repeatable, and rapid results – without ever touching or damaging your sample.
Key Features
- Non-Contact & Non-Destructive – Preserves sample integrity, ideal for fragile or high-value thin films.
- Fast Scanning – Measurement time from ≤0.5 to 3 seconds per point, suitable for inline production.
- Wide Thickness Range – From 15 nm up to 70 μm (model SR-C) or 50 nm to 40 μm (model SR-M).
- High Repeatability – 0.02 nm (tested on 100nm SiO₂/Si wafer, 30 measurements).
- Multi-Layer Resolution – Resolves single to multiple layers via reflected light interference technology.
- Flexible Configurations – Choose from SR-M (general purpose), SR-C (extended spectrum), SR-Mapping (thickness mapping), or RT-V (reflection/transmission).
- Customizable Spectrum – Standard 380–1000 nm; extendable to UV 200 nm or NIR 1650 nm.
- Small Spot Size – From 4 µm / 50 µm up to 0.5–1.5 mm for micro-area measurements.
- Perpendicular Incidence – Simplified alignment and accurate measurement.
SR/RT Series
Thickness Gauge:
Based on the analysis of the reflection spectrum formed by the interference of reflected light from the thin film surface and interface, it enables rapid characterization of the thickness of various dielectric protective films, semiconductor thin films, glass coatings, etc.
Product Advantages
Optical Thin Film Measurement Solutions
Non-contact, non-destructive measurement
Coverage from single-layer to multi-layer thin films
Core algorithms cover thin films to thick films
Flexible configuration, supports customization
Multilayer Thin Film Resolution Capabilities
Based on the principle of reflected light interference between the upper and lower interfaces of thin film layers, the characteristics of single-layer to multilayer thin films can be easily resolved.
Core algorithms cover thin films to thick films
Powerful core analysis algorithms include: FFT analysis of thick films and curve fitting analysis of thin film physical parameters.
Technical Specifications
| Instrument Type | Reflective film thickness gauge | Reflection and Transmission Measuring Instrument | ||
| Model | SR-M | SR-C | SR-Mapping | RT-V |
| Basic Functions | Reflectivity, Film Thickness, n/k, etc. | Parameters such as reflectivity, transmittance, film thickness, and n/k | ||
| Analytical Spectrum | 380-900nm | 380-1000nm (wavelength extended to UV 200nm or 1650nm) | ||
| Film Thickness Measurement Range | 50nm-40μm | 15nm-70μm | ||
| Single Measurement Time | 0.5~3s | ≤1s (customization supported) | ||
| Repeatability¹ | 0.02nm | 0.02nm (100nm SiO2 silicon wafer, 30 measurements) | ||
| Measurement Accuracy | The larger of 0.4% or 2nm | |||
| Spot Size | 4um/50um | 0.5-1.5mm | ||
| Incident Angle Method | Perpendicular Incidence | |||
Product Features
Utilizes a high-intensity halogen lamp light source, covering the ultraviolet-visible to near-infrared spectrum;
Employs a highly integrated opto-mechatronic design, resulting in a compact size and easy operation;
Based on the principle of reflected light interference between the upper and lower interfaces of thin film layers, it easily analyzes single-layer to multi-layer thin films;
Equipped with powerful core analysis algorithms: FFT analysis of thick films and curve fitting analysis to analyze the physical parameters of thin films.
Product Applications
Widely used for the measurement of various dielectric protective films, organic thin films, inorganic thin films, metal films, coatings, and other thin films.
Why Choose Our SR/RT Series?
✅ Non-destructive optical measurement – No sample preparation required.
✅ Fast and high throughput – Ideal for R&D and production line QC.
✅ Proven core algorithms – Cover thin to thick films, single to multi-layer.
✅ Customizable – Flexible configurations to match your specific application.
✅ Global support – Ready for export, with technical documentation and after-sales service.
Ready to upgrade your thin film thickness measurement process? Contact us for a quote or a free application evaluation.
About Us
Factory Profile
FAQ
Q1: Who are we?
A1: MSK (Tianjin) Cutting Technology Co., Ltd. was founded in 2015 and has achieved steady growth ever since. The company is Rheinland ISO 9001 certified. Our manufacturing and inspection processes rely on advanced international equipment, such as German SACKE high-end five-axis grinding centers, a German ZOLLER six-axis tool measuring system, and Taiwanese PALMARY machine tools. Our core mission is to supply durable, high-performance CNC cutting tools that meet professional and efficient machining standards.
Q2: Are you trading company or manufacturer？
A2: We operate as a direct manufacturer, with a primary focus on producing carbide cutting tools.
Q3: Is it possible to deliver the products to my freight forwarder based in China?
A3: Yes, that’s no problem. If you already have a freight forwarder in China, we will coordinate the delivery to their warehouse or any other designated address you provide.
Q4: What payment options do you offer to customers?
A4: Currently, we mainly accept T/T (telegraphic transfer) as our standard payment method.
Q5: Can you handle OEM orders or customized product requirements?
A5: Certainly. We fully support both OEM and customization requests. In addition, we offer a custom label printing service to support your own branding efforts.
Q6: What makes MSK a preferred partner for cutting tool solutions?
A6: Here are several key advantages that distinguish us:
Affordable quality – We help clients balance cost and performance by offering reliable products at reasonable prices.
Rapid communication – Our team responds to inquiries and provides quotations within 48 hours.
Consistent reliability – We stand behind every product with a 100% quality assurance commitment.
Tailored assistance – We provide personalized after-sales service and technical guidance based on each customer’s specific needs.
