High Precision Stylus Surface Profiler | Nanometer Step Instrument for Semiconductors

Product Advantages:

Stable performance, fast transmission, automatic calibration, accurate measurement, rapid response, and real-time monitoring.

Stable performance, desktop design.

The revolutionary desktop design achieves a balance of high performance, ease of use, and cost-effectiveness.

Compact and reliable design

Optimized hardware configuration, compact structure, improved testing accuracy and stability, and high efficiency.

Superior materials, durable and long-lasting.

Exquisite workmanship, craftsmanship, high efficiency, and long service life.

Product Information

Product Overview: The Step instrument Probe Profilometer (Step Analyzer) features a revolutionary benchtop design, combining industry-leading technology and design to achieve a balance of high performance, ease of use, and cost-effectiveness, with improved process control from R&D to quality control.

The device achieves excellent repeatability at 4A (0.4nm) and a 40% increase in scanning speed, supporting nanoscale surface topography measurement technology in industries such as microelectronics, semiconductors, touchscreens, solar energy, high-brightness LEDs, medical, and materials science.

Equipment Features

Unrivaled Performance, Step Height Reproducibility Below 4A

Innovative design, comprehensive accessories, and optimized operating and analysis software enable Step instrument to achieve enhanced performance and superior step height reproducibility.

Single-arch Design for Breakthrough Scan Stability

The single-arch design makes Step instrument more robust, minimizing the impact of ambient noise. Step instrument's scanning probes enable simultaneous large vertical range and low-force scanning.

Upgraded "Smart Electronics" for Improved Measurement Accuracy and Stability

Step instrument's upgraded "Smart Electronics," employing an advanced processor, reduces noise levels, making it a more powerful system capable of measuring step heights <10nm.

Optimized Hardware Configuration Reduces Data Acquisition Time by 40%

Utilizing a unique direct-drive scanning stage, measurement time is accelerated by 40% while maintaining industry-leading performance. Step instrument's 64-bit parallel processing Vision64 completes and processes large 3D data files in less time.

64-bit Vision64 synchronous data processing software increases data analysis speed tenfold.

Vision64 is Step instrument's 64-bit parallel processing operation and analysis software, enabling faster loading of 3D topography data and faster application of filters and multi-region database analysis.

Intuitive Vision64 user interface for easier use.

Vision64 software provides an intuitive and simplified user interface, combining intelligent architecture and customizable automation functions for rapid and comprehensive data collection and analysis. Step Instruments' Vision64 significantly simplifies and accelerates operation and data analysis.

Automatic Tip Alignment System for Easy Probe Changes

Step instrument's self-aligning probe assembly allows users to quickly and easily change between different probes, eliminating potential risks during the changeover process.

Wide Range of Probe Models

Step instrument offers a wide range of probe sizes and shapes to meet virtually every application need. Step instrument features a faster and simpler probe changeover process.

Single Sensor Design

Provides low force and a wide scan range on a single plane.

Ensuring High Throughput Testing

Step instrument enables quick and easy setup and execution of automated multi-sample measurement modes to verify the precise thickness of thin films across the entire wafer surface with superior repeatability. This effective monitoring saves valuable time and money by increasing test throughput.

Application Cases

Thin Film Testing - Ensuring High Yields

In semiconductor manufacturing, rigorous monitoring of deposition and etching ratio uniformity, thin film stress, and ITO thin film thickness measurement on touchscreen panels can save significant time and money. Inhomogeneity or excessive stress in the thin film can lead to low yields and poor finished product performance. Step instrument allows for easy and quick setup and execution of automated multi-point testing programs to verify the precise thickness of wafer thin films down to the nanometer level. Step instrument's strong reproducibility provides engineers with accurate thin film thickness and stress testing to precisely adjust etching and deposition for optimal results.

Surface Roughness Inspection - Ensuring Performance

Step instrument is suitable for routine surface roughness assessment of precision machine parts in many industries, including automotive, aerospace, and medical devices. For example, the roughness of the hydroxyapatite coating on the back of orthopedic implants can affect post-implant adhesion and efficacy. Rapid surface roughness analysis using Step instrument can determine whether crystal production meets expectations and whether implants meet product requirements. Using the Vision64 database's pass/fail criteria, quality management departments can easily determine whether implants need to be reworked or their quality ensured.

Solar Grid Line Analysis - Reducing Manufacturing Costs

In the solar market, Step instrument is ideal for measuring the critical dimensions of conductive silver grid lines on monocrystalline and polycrystalline silicon solar panels. The height, width, and continuity of the silver lines are closely related to the energy conduction of the solar cell. Ideally, production should utilize silver appropriately to achieve better conductivity without wasting expensive silver. Step instrument achieves this through software analysis, reporting the critical dimensions of the silver grid lines to determine the precise components required for conductivity. Vision64's data analysis methods and automation features contribute to automating this verification process.

Microfluidics Technology - Detecting Design and Performance

Step instrument is a probe profilometer capable of measuring photosensitive materials with angstrom-level reproducibility over a large vertical range (up to 1 mm). Researchers in the MEMS and microfluidics technology industries can use Step instrument for qualification testing to ensure parts meet specifications. The low-force measurement function NLite+ lightly touches the photosensitive material to measure vertical steps and roughness.